XYZ Axis Piezo Stage 100×100×100 µm P-616
Compact XYZ piezo stage with 40mm size and 100µm operation on the XYZ axis.
The P-616 is an XYZ piezo nanopositioner that employs parallel kinematics. It offers a reproducibility of 10 nm and a system reproducibility of 0.4 nm, featuring high-reliability PICMA piezo ceramics, flexure guides, and capacitive sensors built into each axis. It is ideal for fiber positioning and alignment, microscopy, nano positioning, photonics, and micromanipulation. *For more details, please download the PDF or contact us. 【Features】 *For more details, please refer to the PDF materials or feel free to contact us.
basic information
- Maximum travel range of 100×100×100μm - Extremely compact and lightweight - Excellent resolution and fast response - High-speed 3-axis scanning - Frictionless and high-precision flexure guide system 【Product lineup (excerpt)】 - P-611.3S - P-611.3SF - P-616.3C, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Photonics / Built-in Optical Devices ■ Micromanipulation ■ Biotechnology ■ Semiconductor Testing ■ Fiber Positioning, etc. *For more details, please refer to the PDF document or feel free to contact us.