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<New Product> High Generation Power & High Precision Piezo Linear Stage N-332

Linear stage with a stroke of 25mm or more driven by piezo walk.

- Travel range: 25mm and 50mm types - 75 N active force - 3 nm minimum incremental motion - Self-locking when power is off - Multi-axis setup compatible: XY, XZ, XYZ - Vacuum compatible

Related Link - https://www.pi-japan.jp/ja/expertise/technology/pi…

basic information

<PICMAWalk Drive Achieving Nanometer Precision and High Feed Force> Multiple piezo actuators perform a walking motion that connects to the feed of the runner. By controlling the actuators, it enables the smallest steps and movements with nanometer resolution. In contrast to other piezo motor drive methods, the PICMAWalk walking drive is not affected by sliding friction. This is based on the stick-slip contact of multiple piezo actuators stepping along the runner. When stationary, the PICMAWalk walking drive self-locks, consuming no energy and generating no heat.

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Applications/Examples of results

Application Fields - Scanning Electron Microscopes (SEM) and Transmission Electron Microscopes (TEM) in life sciences and semiconductor manufacturing - Super-resolution microscopy, particularly 4Pi microscopy - Nanoindentation

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