High-precision Z-axis voice coil motor stage V-Z03 | Precision high rigidity drive
Achieving sub-micron precision Z-axis control with high-speed response and high-rigidity guide.
The V-Z03 achieves high-speed and high-precision Z-axis control through a direct drive system using a voice coil motor. With a high-rigidity cross roller guide and linear encoder, it enables fine movements with a minimum of 0.035µm. It supports a maximum load of 150N and is equipped with a self-locking function and pneumatic counterbalance. It demonstrates excellent performance in demanding fields such as semiconductor manufacturing and precision measurement.
basic information
- Travel range: 5mm - Optical linear encoder - High rigidity, low pitch/yaw - Maximum load: 150N - Equipped with self-locking function *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
- Precision positioning in industrial and research fields - Semiconductor inspection, etc. *For more details, please refer to the catalog or feel free to contact us.
