Direct Drive High-Precision Rotary Stage V-62x Series
Achieves high-speed and high-precision operation with high rigidity and less than 1µm of eccentricity and flatness, equipped with an opening.
The Direct Drive High-Precision Rotary Stage V-62x is a frictionless torque motor-driven stage equipped with a high-resolution encoder. It achieves excellent rotational accuracy (eccentricity and flatness <1 µm) and minimal tilt error (±20 µrad), making it ideal for applications that require advanced alignment and rotational control. The platform diameter ranges from 85 mm to 210 mm and supports installation in any orientation. It can be utilized in a wide range of fields, including optics, semiconductors, and biomedical applications.
basic information
- Efficient dynamic performance through direct drive - Motion platform with diameters of 85 mm, 110 mm, and 210 mm - Eccentricity and flatness < 1 μm - Slim design *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
- Sample inspection - Precision micro-assembly - Research - Biotechnology - Semiconductor inspection and measurement - Automation - Device assembly - Laser microfabrication - Sensor calibration and testing *For more details, please refer to the catalog or feel free to contact us.*
