High Power Piezo Nano Stepping Drive N-216
Innovating nano positioning with a holding force of up to 800N and a resolution of 5nm.
The N-216 is a piezo stepping actuator with a maximum holding force of 800N and a resolution of 0.03nm (open loop) / 5nm (closed loop). Thanks to its unique PiezoWalk® technology, it enables high-speed and nano-precision positioning while switching between full-step mode and nano-stepping mode. It is suitable for non-magnetic, clean, and vacuum environments, making it ideal for applications that require fine control, such as semiconductor manufacturing, wafer inspection, and nano-lithography.
basic information
- Stroke: 20mm - Resolution: 0.03nm (open loop) - 5nm (closed loop) - Maximum holding force: 800N - Automatic lock when stationary - Non-magnetic and vacuum-compatible operating principle - Clean room compatible *For more details, please refer to the catalog or feel free to contact us.*
Price range
Delivery Time
Applications/Examples of results
- Semiconductor manufacturing - Semiconductor testing - Wafer inspection - Nano lithography - Nano imprinting - Nano measurement - Active vibration damping - Operation in a strong magnetic field *For more details, please refer to the catalog or feel free to contact us.*