Industrial Hexapod for Laser Micromachining
Performing highly reliable positioning in various directions.
In laser microprocessing, even slight positional shifts or posture errors can significantly affect processing quality. The H-815 hexapod maintains optimal conditions for processing points, focal positions, and workpiece posture through sub-micron precision positioning and high reproducibility achieved by simultaneous control of six axes. This ensures stable processing quality. 【Application Scenarios】 - Reduction of processing variation - Integration into semiconductor manufacturing equipment - High-precision inspection processes 【Benefits of Implementation】 - Stabilization of manufacturing processes - Improved reproducibility of fine patterns - Stable operation 24 hours a day, 365 days a year
basic information
【Features】 - Maximum speed: 20 mm/s - Reproducibility: ±0.05 µm - Minimum incremental motion: 50 nm - Load capacity: 10 kg - Control: Controller with PIMikroMove software: C-887.4xx1 【Our Strengths】 As the Japanese subsidiary of PI, a company with over 50 years of experience headquartered in Germany, we provide optimal positioning solutions tailored to our customers' needs. We offer a wide range of products, including piezo stages, linear motor-driven products, and high-precision air bearing stages.
Price information
For more details, please contact us or refer to the catalog.
Delivery Time
Model number/Brand name
H-815
Applications/Examples of results
Glass, ceramics, semiconductor substrates
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.