Cleaning unit for semiconductor wafers 'PA10-Q60AE-S'

Efficient removal of fine particles through direct substrate irradiation. Precision wafer cleaning unit using high-frequency megasonic. *Demo unit available.

last updated Dec 11, 2025

Ultrasonic Sound Pressure Sensor "PT-VM02" for Semiconductor Cleaning Tanks

Visualizing cavitation intensity and aging degradation numerically! Accurately measuring the condition of the cleaning tank to support stable operation of the equipment.

last updated Nov 12, 2025

LEO Unit PT-0878LEO

Achieving long-duration running! A cleaning liquid treatment unit equipped with deep ultraviolet LEDs for a dehydrated mercury-free society.

last updated Nov 06, 2025

Sound Pressure Level Meter "Sonic Checker PT-VM02"

The sensor part can be made of quartz! There is no contamination from the cleaning solution.

last updated Nov 12, 2025

Cleaning unit "Proximity Type Megasonic PA10-Q60AE-S"

Suitable for cleaning silicon wafers, photomasks, liquid crystal glass, magnetic disks, etc., cleaning after CMP, and batch-type cleaning.

last updated Nov 05, 2025

Ultrasonic cleaning unit

Remove particles through cavitation generated by ultrasonic liquid resonance! Suitable for cleaning magnetic disks and more.

last updated Oct 22, 2025

Fine Series Cleaning Unit

Damage-free cleaning of submicron particles with high frequency from 750 kHz to 3.0 MHz.

last updated Oct 22, 2025

Precision cleaning device

Achieving super clean cleaning with a sophisticated ultrasonic cleaning unit.

last updated Oct 22, 2025

Disk cleaning device

Achieving high-quality cleaning through a combination of batch washing and brush cleaning.

last updated Oct 22, 2025

Cassette-less cleaning device

Achieving a high level of both quality and energy efficiency. Cleaner with a smaller amount of solution in the tank.

last updated Oct 22, 2025

Spin Sonic Cleaner

Simultaneous non-contact cleaning of both sides of the wafer, even for submicron particles.

last updated Oct 22, 2025

Cleaning Unit "Fine Sonic"

Batch-type megasonic! Various frequencies such as 750kHz and 2000kHz can be selected.

last updated Oct 08, 2025

Cleaning Unit "Fine Scroll"

Introduction of sheet and flat feeding cleaning tools for small substrates to large LCD panels!

last updated Oct 08, 2025

Cleaning Unit "Fine Jet"

Stable oscillation from low to high output to meet a wide range of needs for single-sheet cleaning!

last updated Oct 08, 2025