神港精機 東京支店 Official site

Testing for the sheet-type plasma reflow device (fluxless reflow) is now open.

Fluxless wafer bump reflow device. Achieves fine bump reflow without wet processes. Sample demo available. Reflow video posted.

Fluxless reflow in a strong reducing H2 radical atmosphere of damage-free downflow-type surface wave plasma, reducing flux application and cleaning processes, as well as application and cleaning equipment. A completely dry CtoC system. Achieving a short tact reflow process for fine pitch bumps.

Related Link - http://www.shinko-seiki.con/

basic information

Charge-up damage-free process. Highly reliable and stable transport mechanism. Reflow temperature profile on a 300mm wafer with uniform temperature distribution. Supports full-scale mass production lines for 300mm wafers. Compatible with various upper communication standards, SMIFF pods, etc. Consistent team support from testing to design, delivery, and startup.

Price information

Please contact us.

Delivery Time

Model number/Brand name

CtoC type plasma reflow device

Applications/Examples of results

Wafer bump reflow Fine bump reflow on large substrates 300mm wafer single-sheet low-temperature annealing

Detailed information

Related Videos

Line up(1)

Model number overview
Batch-type plasma flow device Batch type compatible with 300mm wafers, deploying cutting-edge processes for niche devices. For R&D and small-scale production.

Plasma Cleaning Device "POEM" Brochure

PRODUCT

ICP Etching Equipment Brochure

PRODUCT

Distributors

Recommended products