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SDR-type roll-to-roll sputtering device (RtoR type sputtering device)

Currently responding to sample tests, developing films and metal foils for flexible devices and advanced functional materials, and supporting mass production. Process support with demo equipment.

Achieving mass production of flexible electronic devices represented by FPC with proven results. Reliable response to various individual requirements through process support using in-house demonstration equipment. Proven results with a wide range of substrates, including not only general resin films but also metal foils. Stable operation is realized through a high-utilization cathode developed in-house and a well-established transport mechanism. Equipped with a variety of optional mechanisms such as plasma pre-treatment electrodes, cathodes for magnetic materials, and main rolls for substrate heating, it can be operated as a multipurpose continuous film processing device. Flexible realization of hardware and software according to purpose and application, including small machines for R&D and batch-type equipment compatible with sheets.

basic information

Device type: Roll-to-roll magnetron sputtering system Substrate size: Compatible with a maximum width of 1000 mm Number of cathodes: Up to 4 Film types: Metal, magnetic films, reactive oxide films Optional features: Plasma pre-treatment mechanism, ion gun, lamp heater, heating roll, etc.

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Model number/Brand name

SDR-type roll-to-roll sputtering device

Applications/Examples of results

*FPC (Flexible Printed Circuit Board) - Formation of a plated seed layer *Advanced Materials - Formation of a nanocarbon material growth layer - Metallization of carbon fiber surfaces

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Model number overview
SDR8120 Model Compact roll-to-roll sputtering device compatible with substrate widths of 150 to 200 mm, incorporating mechanisms from higher-end models such as various cathodes (for magnetic materials and reactive applications) and pre-treatment systems, multifunctional roll-to-roll sputtering device

Reel-type plasma treatment device

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SDR-type roll-to-roll sputtering device

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