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Hybrid hard film coating device (DLC-CVD + PVD device)

Composite coating device for CVD-DLC and hard film PVD. Smooth surface PVD film + high-rate DLC. Hardness + tribological thin film.

A high-density sputter cathode ADM system (arc discharge type magnetron sputtering cathode) has been added to the well-established PIG-type DLC coating equipment for automotive DLC films. A hard alloy film is laminated onto the DLC film, which has excellent tribological properties, achieving a new hard coating with a smooth surface. The conventional DLC film has also been enhanced with the new cathode's functions, improving performance. Adhesion and resistance to surface pressure can be easily improved. Of course, the conventional PIG-type DLC coating equipment can be upgraded with additional functions. The latest model of the new functional hard film coating equipment can fully demonstrate the performance of CVD/PVD alone.

basic information

The basic structure of the PIG-type DLC coating device has been enhanced by adding two arc discharge magnetron sputtering cathodes. It is capable of stacking hard nitride and oxynitride films. Furthermore, it achieves new functional hard films by layering smooth DLC substrates at the nano level and other hard films. It can be effectively utilized for both hard films and solid lubrication films. A hard film coating device that supports new functions and multiple applications.

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Applications/Examples of results

Automotive parts coating Mold and cutting tool coating

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