神港精機 東京支店 Official site

Dry pump (dry vacuum pump) SSH series

Next-generation dry pump capable of energy-saving operation, equipped with monitoring and protection features.

This is a smart dry pump that maintains the robustness of the SST series, which has a wealth of achievements, while enabling energy-saving operation and featuring protective and remote functions. ● The unique design of the surface-sealed screw rotor minimizes the decrease in exhaust speed due to rotor wear, resulting in a dry pump with excellent performance. ● It allows switching between "Power Mode," which prioritizes exhaust speed, and "Economy Mode," which focuses on energy savings. ● In the case of non-corrosive gases, cooling gas, sealing gas, and purge gas are unnecessary. ● It is equipped with a pump controller, allowing for manual operation and remote control. ● It detects issues such as insufficient cooling water, overload, and abnormal heat generation. Alarm and automatic shutdown functions help prevent damage to the pump. ● The pump operates at a low rotational speed, resulting in a long lifespan for the shaft seals, bearings, gears, and other components. ● Equipped with casters.

Related Link - https://www.shinko-seiki.com/products/105/

basic information

We offer optional items such as seal gas and purge gas depending on the application. ◆◇◆ For more details, please contact us ◆◇◆

Price information

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Delivery Time

Model number/Brand name

SSH Series

Applications/Examples of results

◆Main Applications◆ ●Vacuum soldering equipment (power semiconductors) ●Thin film formation equipment (molds, electronic devices) ●Vacuum source for suction transport (small electronic components) ●Sealing equipment (semiconductor chips) ●Insulation layer depressurization (gas storage tanks)

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