Macro inspection device | High-speed simultaneous detection of foreign substances, film unevenness, and defects on wafers.
Imaging 12-inch wafers in 7 seconds. With a unique optical system that captures defects without resolution, inspection time is shortened to one-fourth of the industry standard, enabling 100% inspection.
Smix Corporation is a specialized manufacturer of "macro optical inspection" that brings innovation to the inspection processes in the semiconductor industry. We break the industry's common belief that "increasing resolution narrows the field of view and requires longer inspection times" with our unique optical systems and in-house developed line sensor cameras. We have achieved ultra-fast inspection, capturing 12-inch wafers in just 7 seconds, which is four times faster than the industry standard. 【Provided Solutions】 ■ "Dark field optical system" that captures 0.1μm foreign particles on wafers ■ "Off-axis optical system" that visualizes nano-level surface distortions ■ "Measurement correlation technology" that quantifies changes in film thickness and pattern size We offer these advanced optical technologies as "inspection modules" to contribute to the competitiveness of semiconductor and equipment manufacturers. *For more details, please refer to our catalog or feel free to contact us. *We are currently accepting requests for evaluations of the actual equipment. The first sample evaluation will be provided free of charge.
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Smix Corporation is a company specializing in the development, manufacturing, and sales of devices for macro optical inspection. We can perform macro inspections that have a high correlation with CD, capture size variations of 3nm on a macro scale, and visualize the unevenness of mirror-like wafers. By implementing our macro inspection, customers can establish a more efficient and cost-competitive inspection process. Trust us with your macro optical inspection needs.