Datapaq Temperature Measurement System for Thin Film Process/Vacuum Process
A temperature measurement system specifically designed for measuring the temperature of products during the thin film process.
The temperature measurement system for film deposition and vacuum processes by Fluke Process Instruments (formerly known as Datapaq) can be introduced into film deposition equipment by using a specially designed heat-resistant case that protects the temperature data logger from heat. By specializing for use in a vacuum, we have succeeded in miniaturizing the heat-resistant case, enabling product temperature measurement in various film deposition devices that could not be used with existing heat-resistant cases due to dimensional constraints. The DP5 series data logger allows users to replace the battery, achieving a reduction in total cost of ownership (TCO) and minimizing downtime.
basic information
Fluke Process Instruments offers temperature measurement logger systems for various industries and applications. By developing a heat-resistant case specifically designed for processes such as film deposition in a vacuum, we have achieved significant miniaturization, enabling use during vacuum processes like film deposition. Measuring the actual temperature of the product allows for precise process management, contributing to improved product quality. This also greatly simplifies temperature measurement tasks during product development, equipment assembly adjustments, and installation adjustments at customer sites for vacuum equipment manufacturers.
Price range
Delivery Time
Applications/Examples of results
Thin film formation processes for lenses, eyeglass lenses, films, etc. (such as deposition, film formation, sputtering, etc.), vacuum processes for solar cell panels, glass, display panels, and glass for electronic devices like smartphones, etc.
