Electrostatic chuck and ESC atmosphere sintering furnace
For the firing conditions of ESC ceramic components. Contributes to improving the reproducibility of firing quality with an N₂ + H₂ reduction atmosphere and dew point control.
This is a high-temperature sintering furnace with atmosphere control designed for electrostatic chucks (ESC) and the firing, reduction treatment, and binder removal of ceramic components. It supports operation in N₂ and N₂ + H₂ reduction atmospheres, enabling high-temperature processing up to 1000°C for regular use and a maximum of 1650°C. Additionally, with optional features, it can accommodate wet gas introduction, dew point control, and dry/wet switching, making it useful for examining conditions related to the firing quality, densification, insulation properties, surface condition, and internal electrode state of materials. Since it allows for processing while switching atmospheres within the same chamber, it helps reduce movement between processes and exposure to outside air, contributing to improved reproducibility of firing conditions, reduced variation, and increased efficiency in prototype evaluation. If you are facing challenges with firing conditions for ESCs, N₂ + H₂ reduction treatment, or dew point management in ceramic firing, please feel free to consult us.
basic information
【Specifications】 - Internal dimensions: W550 × D550 × H600 mm - Maximum temperature: Normal use 1000℃, maximum 1650℃ - Atmosphere: N₂, N₂ + H₂, Dry/Wet switchable - Processing method: Batch type - Heater: W heater - Internal material: Ceramic insulation material - Utility: Electric AC380V, 3-phase, 60Hz, 82kVA - Gas pressure: 0.3MPa - Cooling water: Approximately 25℃, 0.2MPa - Safety mechanisms: H₂ afterburner, over-temperature prevention, exhaust system safety protection, pressure monitoring, shut-off valve, etc. - Custom options: Internal dimensions, temperature, atmosphere, dew point control, safety specifications, etc. can be individually designed.
Price information
For more details, please feel free to contact us.
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Applications/Examples of results
【Applications and Examples of Achievements】 - Sintering of ceramic parts for electrostatic chucks (ESC) - High-temperature treatment in N₂ + H₂ reduction atmosphere - Establishing sintering conditions through dry/wet atmosphere control - Sintering of ceramics with dew point control - Debinding, reduction, decarbonization, and surface condition adjustment - Atmosphere sintering of ceramic parts including internal electrodes - Prototype and mass production considerations for ceramic parts for semiconductor manufacturing equipment - Evaluation of color tone, density, insulation properties, resistance values, warping, and variability based on atmospheric conditions
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Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.