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Improved heating efficiency for energy savings! Achieving reduced thermal budget with high responsiveness.

For more details, please refer to the PDF document or feel free to contact us.

Depending on the work size, multiple flash lamps can be arranged! Large area simultaneous irradiation and high-intensity irradiation are possible!

【Specifications (Excerpt)】 <For Experiments / Large Area> ■Irradiation Area (mm): 100×150 / 500×500 ■Irradiation Energy (J/cm²): up to 40 / up to 4 ■Uniformity (%): 75 or more / 90 or more ■Pulse Width Setting Range (msec): 1 to 60 ■Emission Cycle (sec): 60 or more / 6.5 or more *For more details, please refer to the PDF document or feel free to contact us.

Ideal for heating food such as fryers! Double tube heater lamp with enhanced airtightness.

【QIRT100V500W Specifications (Excerpt)】 ■Rated Voltage: 100V ■Power Consumption: 500W ■Rated Lifespan: 5000h ■Color Temperature: 2400K ■Total Length (L1): 500mm *For more details, please refer to the PDF document or feel free to contact us.

Selectable based on the shape of the heating target and the irradiation range! Introduction of the heater unit.

【Lineup (Excerpt)】 ■ Focus Type ・UH-HUC-CL200 ・UH-HUC-CL350 ■ Parabola Type D ・UH-HUD-CL200 ・UH-HUD-CL350 ■ Parabola Type M (Flat back shape / Can be mounted on water-cooled panels, etc.) ・UH-HUM-CL200 ・UH-HUM-CL350 *For more details, please refer to the PDF document or feel free to contact us.

Select lamps, mirror shapes, and cooling methods tailored to the user's required temperature, output, dimensions, and other characteristics!

【Lineup (Excerpt)】 ■ Focus Type ・UH-HUF-CL200 ・UH-HUF-CL350 ■ Parabolic Type P ・UH-HUP-CL200 ・UH-HUP-CL350 ■ Parabolic Type N (Compact Type, Gold-Plated Mirror Specification) ・UH-HUN-CL200 ・UH-HUN-CL350 *For more details, please refer to the PDF document or feel free to contact us.

High-efficiency energy source! Introducing light heating products such as infrared halogen heaters.

【Other Published Content (Partial)】 ■Circle-shaped Halogen Heater Lamp QIR Circle ■Straight Tube Halogen Heater Lamp QIRT ■Special Processing of Lamps ■Infrared Halogen Heater Technical Documentation ■About Control Methods ■Temperature Rise Data Examples ■Line Heater Unit ■High Power Line Heater Unit (Custom-made) ■Circle Heater Unit ■Spot Heater Unit *For more details, please refer to the PDF document or feel free to contact us.

A heating device capable of large-area simultaneous irradiation and high-intensity irradiation! It can also perform multiple pulse irradiations.

【Other Features】 ■Depth Control (Pulse Control) - By controlling the current flowing to the lamp with a semiconductor switch to turn it ON/OFF, it is possible to adjust the lamp current and pulse width, allowing control of heating depth (0.1 to 60 msec). - Multiple pulse irradiation is also possible. *For more details, please refer to the PDF document or feel free to contact us.

Processing compatible with vacuum is possible! It can be utilized when heating is required for circular shapes or within a circular range!

【Lineup】 ■QIR100V1000W/100C ■QIR200V1000W/150C ■QIR200V2000W/150C ■QIR200V3000W/200C *For more details, please refer to the PDF document or feel free to contact us.

[Case Study] Insulation and Heating of Liquids

This is an introduction to examples of liquid temperature maintenance and overheating using Ushio's light source for thermal heating, which has a tradition and a wealth of achievements. 【Features】 ○ Capable of maintaining temperature and humidifying pure water and chemical solutions used for cleaning silicon wafers in semiconductor manufacturing lines and glass substrates in LCD manufacturing lines. ○ Composed of halogen lamps covered with high-quality quartz glass, resulting in minimal contamination from impurities and enabling heating efficiency of over 95%. ● For other functions and details, please contact us.

[Case Study] Preheating of Film Formation Equipment

This is a case study of a preheating system for film deposition equipment using Ushio's light source for optical heating, which has a solid and abundant track record. By using a halogen lamp heater with non-contact and high-speed heating capabilities even in a vacuum environment, we can contribute to reducing tact time in film deposition processes for semiconductors, FPDs, and solar cells. ● For other functions and details, please contact us.

[Case Study] RTP (Rapid Thermal Process)

This is a case study of RTP using light sources for light heating from Ushio, a company with tradition and a wealth of achievements. In the past, semiconductor thermal processing commonly used furnaces (insulated), but for nano-order devices, thin film formation and shallow junctions are required, making RTP, which is synonymous with isothermal processes, a key technology. Additionally, in next-generation semiconductors, flash lamp annealing has become the mainstream technology as a thermal flux technique. ● For other functions and details, please contact us.

What can be done with Ushio's light: Heating "Joining"

This is an introduction to practical examples of Ushio's light sources for light heating (joining), which has a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Halogen heaters are used for the welding of various heat sink pipes ○ The light from the halogen heater is emitted as radiant heat, making it less affected by the surrounding environment compared to hot air types, allowing for rapid heating to the desired temperature ○ Unlike heating with gas burners, it is suitable for reducing CO2 environmental impact ● For other functions and details, please contact us.

What can be done with Ushio's light: "Impurity Diffusion"

This is an introduction to practical examples of Ushio's light sources for light heating, which have a solid and abundant track record (impurity diffusion). 【Features】 ○ Light sources used: Xenon flash lamps, halogen heater lamps ○ In the semiconductor process, implants are performed on the source drain, followed by an annealing process to activate the doped impurities. ○ Utilizing the characteristics of xenon flash lamps, it is possible to perform high-temperature annealing in a very short time frame (on the order of milliseconds) to extremely shallow depths (on the order of nm) compared to the previous active layer depth, thereby preventing impurity diffusion. ● For other functions and details, please contact us.

What can be done with Ushio's light: "Heating/Film Formation"

This is an introduction to practical examples of Ushio's light sources for light heating (heating/thin film deposition), which has a tradition and a wealth of achievements. 【Features】 ○ Light source used: Halogen lamp heater ○ Optimal as a heat source for CVD and sputtering equipment used in the manufacturing processes of semiconductors, FPDs, and solar cells for the formation of metal films and insulating films. ○ Furthermore, by using halogen lamp heaters for moisture removal and preheating before film deposition, it achieves improved throughput and high-quality film formation. ● For other functions and details, please contact us.

Designed through 3D reflective light simulation! Excellent heating uniformity and temperature rise performance.

【UL-HU-CH10KW/STD Specifications (Excerpt)】 ■Rated Voltage: 200V ■Power Consumption: 10kW ■Unit Outer Diameter: 198mm ■Unit Depth: 160mm ■Weight: 6kg *For more details, please refer to the PDF document or feel free to contact us.