Automated transport cassette clean oven
Introducing the automatic cassette clean oven with a conveyor that can process one set at a time!
We would like to introduce our "Automated Transport Cassette Clean Oven." It is designed to handle a set of 6 cassettes, each containing 25 pieces of 8" wafers, using one clean oven along with loaders and unloaders equipped with transport robots. It is capable of processing one set at a time. The transport method can be either automatic or manual, and the maximum temperature inside the clean oven is 140°C. The external dimensions are 2590 (W) × 1400 (D) × 2400 (H). 【Main Specifications】 ■ Processed Wafers: 8” quartz wafers in cassettes × 6 ■ Transport Method: Automatic / Manual ■ Clean Oven Internal Temperature: MAX 140°C ■ Clean Oven Cleanliness: Class 10 at 0.3μm RT ■ External Dimensions: 2590 (W) × 1400 (D) × 2400 (H) *For more details, please refer to the PDF document or feel free to contact us.
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This brand name was chosen to signify the creation of highly unique products with the aim of "EXTENSIVE VISION ON SYSTEM." Current technological innovations are remarkable, and the demands of the times are constantly becoming more advanced. We believe that it is our mission at Zebios to contribute to the industry by consistently proposing differentiated equipment that will revolutionize the now-mature equipment industry.