Ultrafine Leak Test System | MUH-0100
High-sensitivity leak testing for small electronic components! We offer solutions down to ultra-fine leaks [patented technology].
The "MUH-0100 series" is a leak testing device specifically designed for ultra-micro leak measurement that employs the "capsule accumulation method." Our company has developed a high-sensitivity helium leak detection technology called the "capsule accumulation method" for measuring ultra-micro leaks. MEMS components such as angular velocity sensors and infrared image sensors, as well as small electronic components, need to maintain their sealing properties over long periods, requiring high airtightness. 【Capsule Accumulation Method Features】 ■ Capable of measuring up to 4×10⁻¹⁵ Pa·m³/s (He) ■ Significantly reduces background noise ■ Capable of detecting ultra-micro helium leaks ■ Reduces the influence of gases other than helium, which can be sources of error ■ Eliminates the need for heaters or ultra-low temperature pumps, with startup maintenance times comparable to standard helium leak detectors ■ Commercially available standard leaks can be used for calibrating helium accumulation amounts *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Capsule Size】 ■ φ16 × L10 mm (Square 10×10) ■ φ30 × L20 mm (Square 20×20) ■ φ44 × L31 mm (Square 30×30) *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Inspection Target Examples] ■MEMS Components (Pressure sensors, acceleration sensors, angular velocity sensors, infrared image sensors) ■Electronic Components ■Hermetic Packages ■Crystal Devices etc. *For more details, please refer to the PDF document or feel free to contact us.