Custom-made gas analysis system

Contributing to research and development and quality control in manufacturing across diverse fields!

last updated May 16, 2025

High Cost Performance: Capacitance Gauge / Cold Cathode Pirani Gauge

A vacuum gauge suitable for various vacuum systems.

last updated Jun 18, 2024

Canon Anelva Corporation Company Profile

Contributing to the development of society! Providing high value-added products using ultra-vacuum technology.

last updated May 18, 2022

Measuring Ball "Miniature Gauge"

Easy selection of installation location! Pressure measurement up to process pressure (measurable in the range of 1 Pa) can be performed with a single gauge.

last updated Jan 23, 2023

Vacuum gauge "Piranha Gauge"

Suitable for measuring low and medium vacuum areas! Standard type and type with set point are available.

last updated Jan 24, 2023

Lightweight and compact! Diaphragm vacuum gauge "Capacitance Gauge"

A small silicon MEMS chip is used in the pressure sensor section. It minimizes the influence of external environments, allowing for high-precision and stable measurement of absolute pressure.

last updated Aug 22, 2023

Isolate Valve "V-025SV"

No special control circuit is needed! Prevents backflow of oil from the exhaust system side of the oil rotary vacuum pump.

last updated Jan 23, 2023

Gas inlet valve '951-7179 Inlet Valve'

Using a bellows for the shaft seal! There is no worry about atmospheric contamination during gas introduction.

last updated Jan 23, 2023

Ultra High Vacuum Variable Leak Valve

Fully metal construction allows baking up to 450°C! Gas flow can be adjusted over a wide range.

last updated Jan 23, 2023

L-type valve "V Series"

Rich connection flange! The valve body is made of stainless steel.

last updated Jan 23, 2023

Rough pull valve "V Series"

Achieving miniaturization and low cost! Suitable for valves for high vacuum devices and roughing valves for ultra-high vacuum devices.

last updated Jan 23, 2023

Ultra High Vacuum L-Type Polyimide Valve

Uses polyimide resin! Capable of withstanding repeated baking up to 300°C.

last updated Jan 23, 2023

Ultra-high vacuum L-type all-metal valve

Excellent thermal tolerance! Bake-out is possible up to 400°C or 450°C.

last updated Jan 23, 2023

Vacuum component "current terminal"

Usable up to ultra-high vacuum conditions! Excellent thermal, mechanical, and electrical properties.

last updated Jan 23, 2023

Vacuum component "Linear Guide"

All components are non-magnetic! A bellows-type linear feedthrough that completely isolates the vacuum side from the atmosphere using a bellows.

last updated Jan 23, 2023

Rotary introducer (magnetic coupling type, bellows type)

You can choose from various types ranging from 3 kg·cm to a maximum of 100 kg·cm for high torque applications!

last updated Jan 23, 2023

Supplementary materials

Mori Paste 500 is effective for lubrication in low-speed, heavy-load areas! Introduction of auxiliary materials such as sheath heaters.

last updated Jan 23, 2023

Vacuum component "Ultra High Vacuum Viewing Port"

Wide and clear effective field of view! It has excellent radiation resistance with minimal changes in transmittance and discoloration.

last updated Jan 23, 2023

Vacuum component "Vacuum Switch"

The seal with the atmosphere is a welded structure, so it can be connected to ultra-high vacuum! Control signals for various vacuum systems can be extracted.

last updated Jan 23, 2023

Vacuum component "Quick Coupling"

The clamp is coated with nickel for excellent corrosion resistance on aluminum alloy! Depending on the heating temperature, it is possible to select the "O" ring.

last updated Jan 23, 2023

ICF connection components (fittings and adapters)

Usable up to ultra-high vacuum with ICF flange! There is a wide variety available, so it can be used according to your needs.

last updated Jan 23, 2023

Ultra High Vacuum Flange (Vacuum Component) 'ICF Flange'

The sealing gasket is made of copper plate and employs special treatment for ultra-high vacuum! It features a completely symmetrical flange without male or female parts.

last updated Jan 23, 2023

Vacuum Pump "Foreline Trap"

It is possible to easily prevent the backflow of oil vapor! It efficiently adsorbs oil molecules.

last updated Jan 23, 2023

POWER Eco Series High-Performance Energy-Saving Cryopump

In addition to small models, we also offer medium and large sizes! They have significant advantages in both performance and energy efficiency.

last updated Jan 23, 2023

POWER Series High-Performance Cryopump (Compact)

Small type with an intake diameter of 8 to 12 inches! Achieved safe high-speed regeneration without a heater.

last updated Jan 23, 2023

Ultra-high vacuum compatible sputter ion pump "Excel Pump"

40% size reduction! Achieves high efficiency with built-in baking heater and moisture retention cover.

last updated Jan 24, 2023

Vacuum pump "Ion pump - Noble pump"

No vibration, no noise! You can use it safely for unmanned driving at night without worrying about contaminating the exhaust system!

last updated Jan 24, 2023

Ion pump/noble pump control device "P-500"

Improved visibility and functionality with the new design! Suitable for automation equipment and remote control devices.

last updated Jan 24, 2023

Compact Gas Analysis System "C Series"

The quadrupole mass spectrometer is available in four models! A space-saving and easy-to-use analysis system.

last updated Jan 20, 2023

Compact Gas Analysis System "D Series"

Easy measurement possible with computer control! Application technology products of quadrupole mass spectrometers.

last updated Jan 20, 2023