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We can provide everything from components to subsystems for semiconductor manufacturing equipment.

■All-in-one products for semiconductor manufacturing equipment We can provide not only components but also subsystems. Among them, the wafer transport robot is equipped with our DD motors and high-rigidity cross roller bearings. Major components are covered by our products, achieving both high performance and affordability. ■Comprehensive technical support We have established "Robot Technology Centers" in Kobe and Tokyo as bases for manufacturing support. Our technical staff assist with demonstration experiments and proof of concept (PoC) verifications, which can often become bottlenecks. We also offer teaching and sample programs, and maintenance personnel can receive special training in accordance with regulations.

High precision & high rigidity! Wafer transport robot compatible with 2-12 inch wafers [E Series]

Single Arm / Double Arm Arm Length: 135mm / 165mm / 185mm The end effector supports vacuum suction, gripping, and inverting methods.

Achieving high speed, high precision, high rigidity, high efficiency, and space-saving! The 【HIWIN Wafer Aligner】 compatible with 2-12 inches.

- Lineup compatible with 2-12 inches - Wafer alignment possible in as short as 4.9 seconds - Correction operations for wafer center and angle can be performed simultaneously, achieving a repeatability accuracy of ±0.1 mm - Cleanliness Class 1

A shared loading port compatible with the loading and unloading of 8-inch and 12-inch products.

- Directly compatible with 8-inch and 12-inch FOUP/FOSB. - The cleanliness of the product is Class 1. It can be used in various semiconductor process equipment such as photolithography, etching, CVD, PVD, cleaning, and inspection. - In compliance with relevant safety regulations, the system provides an emergency stop function and monitors various functional modules such as electrical control systems, sensing systems, and vacuum systems in real-time. It offers users the most comprehensive and safe protection. - All major components of the wafer load port, such as ball screws and linear guideways, are developed and manufactured in-house. Vertical integration of software and hardware allows for customization according to user needs.

For various automation tasks. Hiwin's DD motor.

For details, please refer to the catalog or contact us.

Made of stainless steel, it is ideal for use in high humidity environments and environments requiring corrosion resistance. *Technical documentation available.

■Usage in Adverse Environments Made of stainless steel, it is suitable for use in high humidity environments and environments that require corrosion resistance. ■Compatibility The stainless steel series and carbon steel series have the same appearance and screw dimensions, allowing for direct replacement. ○ For more details, please refer to the catalog or contact us.