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HIWIN Wafer Handling Robot [E Series]

High precision & high rigidity! Wafer transport robot compatible with 2-12 inch wafers [E Series]

Adopting our own DD motor, characterized by high precision and high rigidity. Compatible with 2-12 inch wafers. The design has minimal aging degradation without gears, and the reduced number of parts also decreases maintenance labor. The robot, which balances high performance and affordability, is not limited to wafer transport; it also offers custom solutions for PCB and glass substrate transport applications, and we can propose transport axes for the robot itself tailored to specifications.

Page for HIWIN wafer transport robot

basic information

Single Arm / Double Arm Arm Length: 135mm / 165mm / 185mm The end effector supports vacuum suction, gripping, and inverting methods.

Price range

Delivery Time

Model number/Brand name

HIWIN Wafer Transport Robot DD Motor

Applications/Examples of results

For transportation in the semiconductor, panel, and substrate-related industries.

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HIWIN [PoC Manufacturing Support] Information Brochure

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