Semiconductor subsystem
Semiconductor subsystem
We propose subsystems that go beyond just components for the semiconductor, LED, and FPD industries. Our lineup includes wafer transport robots that achieve both high performance and affordability by utilizing our own key components such as DD motors, as well as wafer aligners that are among the smallest in the industry.
1～8 item / All 8 items
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HIWIN Wafer Aligner
Achieving high speed, high precision, high rigidity, high efficiency, and space-saving! The 【HIWIN Wafer Aligner】 compatible with 2-12 inches.
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HIWIN Wafer Load Port
A shared loading port compatible with the loading and unloading of 8-inch and 12-inch products.
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HIWIN Wafer Handling Robot [E Series]
High precision & high rigidity! Wafer transport robot compatible with 2-12 inch wafers [E Series]
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Support for the introduction of automation and labor-saving solutions
Total support from the introduction of industrial robots to system construction. Improved efficiency in setup changes and transportation with a variety of robots and stages.
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Semiconductor Subsystem Solution
We can provide everything from components to subsystems for semiconductor manufacturing equipment.
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Nano precision positioning stage [N2 stage] *Leaflet available
Nanometer precision positioning stage. For semiconductor inspection equipment and semiconductor manufacturing equipment!
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Standard models of nano-precision positioning stages, four types.
We offer a lineup of standard models for wafer white light interference measurement, PLP inspection, LDI exposure machines, and wafer optical inspection.
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HIWIN Wafer Handling Robot [A Series]
All axes are equipped with AC servo motors. Wafer transport robot compatible with 2-12 inch wafers [A Series].
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