HIWIN Wafer Handling Robot [A Series]
All axes are equipped with AC servo motors. Wafer transport robot compatible with 2-12 inch wafers [A Series].
Equipped with in-house manufactured key components. All axes are equipped with AC servo motors. The repeatability accuracy is up to ±0.1mm, compatible with 2-12 inch wafers. The robot, which balances high performance and affordability, is not limited to wafer transport; it also offers custom solutions for PCB and glass substrate transport applications, and we can propose transport axes for the robot itself tailored to specifications.
basic information
Single Arm / Double Arm Arm Length: 135mm / 160mm / 185mm The end effector supports vacuum suction, gripping, and inversion methods.
Price range
Delivery Time
Model number/Brand name
HIWIN Wafer Transport Robot DD Motor
Applications/Examples of results
For transportation in the semiconductor, panel, and substrate-related industries.
