ハイウィン Official site

HIWIN Wafer Load Port

A shared loading port compatible with the loading and unloading of 8-inch and 12-inch products.

The HLP series of the HIWIN Load Port is a shared load port that supports the loading and unloading of 8-inch and 12-inch products, directly compatible with 8-inch and 12-inch FOUP/FOSB. An optional adapter can be selected for 8-inch open cassettes and 12-inch metal carriers.

basic information

- Directly compatible with 8-inch and 12-inch FOUP/FOSB. - The cleanliness of the product is Class 1. It can be used in various semiconductor process equipment such as photolithography, etching, CVD, PVD, cleaning, and inspection. - In compliance with relevant safety regulations, the system provides an emergency stop function and monitors various functional modules such as electrical control systems, sensing systems, and vacuum systems in real-time. It offers users the most comprehensive and safe protection. - All major components of the wafer load port, such as ball screws and linear guideways, are developed and manufactured in-house. Vertical integration of software and hardware allows for customization according to user needs.

Price range

Delivery Time

Model number/Brand name

HIWIN Wafer Load Port

Applications/Examples of results

Various semiconductor process equipment such as photolithography, etching, CVD, PVD, cleaning, and inspection.

Wafers Road Port Catalog

PRODUCT

Wafer Transport Robot Catalog

PRODUCT

HIWIN [PoC Manufacturing Support] Information Brochure

OTHER

News about this product(4)

Recommended products

Distributors