Semiconductor Subsystem Solution
We can provide everything from components to subsystems for semiconductor manufacturing equipment.
Our company is engaged in a wide range of development and manufacturing, from mechanical component parts to mechatronic products. We offer stainless steel linear guideways "MG Series" and ball screws "Super S Series," suitable for the semiconductor and FPD industries, as well as wafer transport robots, EFEM, wafer aligners, and ultra-precision stages at the nano level. We provide everything from components to subsystems in a one-stop solution, significantly reducing costs and man-hours related to procurement. 【We will be exhibiting at SEMICON Japan】 We plan to showcase mechanical component parts such as stainless steel linear guideways and ball screws for semiconductor equipment, as well as wafer robots and wafer load/unload systems. Please feel free to stop by. Date: December 13 (Wed) to 15 (Fri), 2023 Venue: Tokyo Big Sight (Booth No.: East Hall No. 2309)
basic information
■All-in-one products for semiconductor manufacturing equipment We can provide not only components but also subsystems. Among them, the wafer transport robot is equipped with our DD motors and high-rigidity cross roller bearings. Major components are covered by our products, achieving both high performance and affordability. ■Comprehensive technical support We have established "Robot Technology Centers" in Kobe and Tokyo as bases for manufacturing support. Our technical staff assist with demonstration experiments and proof of concept (PoC) verifications, which can often become bottlenecks. We also offer teaching and sample programs, and maintenance personnel can receive special training in accordance with regulations.
Price range
Delivery Time
Model number/Brand name
HIWIN Wafer Transport Robot Wafer Aligner Load Port
Applications/Examples of results
Semiconductor industry, LED industry, FPD industry, etc.
Detailed information
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[Wafer Transport Robot E Series] Features a proprietary DD motor, known for high precision and high rigidity. Compatible with 2-12 inch wafers. Designed with minimal aging degradation without gears, and fewer parts reduce maintenance effort. Achieves a balance of high performance and affordability, and can also accommodate custom applications for transporting PCBs and glass substrates, beyond just wafer transport. The transport axis of the robot itself can also be proposed according to specifications.
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【Wafer Aligner HPA Series】 The HPA series of wafer aligners features a 3-axis control system, utilizing HIWIN's single-axis robot module to achieve high speed, high precision, high rigidity, high efficiency, and space-saving design. With an all-in-one design of the built-in controller, there is no need for external controller placement or wiring space. Equipped with an intelligent transparent laser sensor, it can detect the contours of objects that are transparent, translucent, and opaque. It can accommodate wafers and glass with diameters ranging from a minimum of 2 inches to a maximum of 12 inches. - Lineup supporting 2-12 inches - Wafer alignment possible in as little as 4.9 seconds - Simultaneous correction of wafer center and angle, achieving a repeatability accuracy of ±0.1 mm - Cleanliness Class 1
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【Wafer Load Port HLP Series】 The HLP series is a shared load port designed for the handling of 8-inch and 12-inch products. It directly accommodates 8-inch and 12-inch FOUP/FOSB. Options for applicable adapters are available for 8-inch open cassettes and 12-inch metal carriers. - Directly compatible with 8-inch and 12-inch FOUP/FOSB. - Product cleanliness is Class 1. - In compliance with relevant safety regulations, the system provides an emergency stop function. It monitors various functional modules such as electrical control systems, sensing systems, and vacuum systems in real-time. - All major components of the wafer load port, including ball screws and linear guideways, are developed and manufactured in-house.
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【Ultra-thin DD Motor DMT Series】 One of the thinnest in the industry, with a thickness of 22mm. The overwhelming thinness and large hollow diameter allow for a space-saving rotation mechanism, increasing the design flexibility for installation! Starting from June 2023, we have begun accepting orders and sales for the new "DMTK3" with a hollow diameter of 340mm and a thickness of 30mm. - Ultra-thin designs of 22mm and 30mm - Large hollow shaft - High resolution with excellent positioning accuracy - Gearless with zero backlash - High torque achieved through a unique magnetic circuit design
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【Miniature Linear Guideway MG Series】 Ideal for the semiconductor industry and small devices! Compact, lightweight, and made of stainless steel. Features a gothic arch groove design that provides high rigidity and precision in all directions. Its compact and lightweight nature makes it suitable for small devices. Due to the gothic arch contact design, it is characterized by high rigidity and precision in all directions. Available in two types with different rail widths: "MGN" and "MGW." The MGW series has a wide design, allowing for a greater moment load capacity.
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【Precision Ball Screw Super S Series】 The Super S Series is a compact ball screw with low noise and long lifespan. - Low noise (5-7 dB reduction compared to standard products) - A special circulation circuit and enhanced design reduce the impact value of the balls, accommodating high acceleration and deceleration speeds - The patented circulation system significantly increases the strength of the return section, achieving a maximum Dm-N value of 220,000 - Compact and lightweight - Compatible with both single nut and double nut configurations.
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Download All CatalogsNews about this product(3)
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39th InterNepCon Japan / Electronics Manufacturing and Assembly Exhibition [HIWIN]
We will be exhibiting at the "39th Internepcon Japan/Electronics Manufacturing and Assembly Exhibition" held at Tokyo Big Sight from January 22, 2025. ◇ Event Period January 22 (Wed) to 24 (Fri), 2025, 10:00 AM to 5:00 PM ◇ Exhibition Venue Tokyo Big Sight ◇ Booth Number East Hall 2 E11-8 ◇ Featured Exhibits ■ N2 Nano Precision Stage A precision stage capable of positioning at the nanoscale. Ideal for the semiconductor industry, which requires high precision! Positioning stability is ±2nm. High-speed stability at 100mm/s is ±0.1%. With a low-profile and stable structure, it can be utilized in high-end precision inspection equipment. Our company develops, proposes, sells, and maintains a wide range of products, including linear motion products with world-class market share, precision instruments related to motion control, and industrial robots. At this exhibition, we will propose subsystems that go beyond components for the semiconductor, LED, and FPD industries. We will showcase mechanical components such as stainless steel linear guideways and ball screws, wafer transport systems, and ultra-thin DDD motors, which are optimal for the semiconductor industry.
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38th InterNepcon Japan / Electronics Manufacturing and Assembly Exhibition [HIWIN]
We will be exhibiting at the "38th Internepcon Japan/Electronics Manufacturing and Assembly Exhibition" to be held at Tokyo Big Sight from January 24, 2024. ◇ Event Period January 24 (Wednesday) to 26 (Friday), 2024, 10:00 AM to 5:00 PM ◇ Exhibition Venue Tokyo Big Sight ◇ Booth Number East Hall 1, E3-18 ◇ Featured Exhibits ■ Semiconductor Subsystem Solutions We develop and manufacture a wide range of products from mechanical component parts to mechatronic products. In addition to stainless steel linear guideways "MG Series" and ball screws "Super S Series" suitable for the semiconductor and FPD industries, we also offer wafer transport robots, EFEM, wafer aligners, and ultra-precision stages at the nano level. At this exhibition, we will showcase mechanical component parts such as stainless steel linear guideways and ball screws optimal for the semiconductor industry, wafer transport robots, wafer aligners, and wafer load/unload systems. The wafer load/unload system is equipped with a double-arm wafer transport robot and a wafer aligner. It is a compact model that contributes to improved space efficiency and work efficiency.
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SEMICON Japan 2023【HIWIN】
We will be exhibiting at "SEMICON Japan 2023," which will be held at Tokyo Big Sight from December 13, 2023. ◇ Event Period December 13 (Wed) - 15 (Fri), 2023, 10:00 - 17:00 ◇ Exhibition Venue Tokyo Big Sight ◇ Booth Number East Hall 2, 2309 ◇ Featured Exhibits ■ Semiconductor Subsystem Solutions We develop and manufacture a wide range of products from mechanical component parts to mechatronic products. In addition to stainless steel linear guideways "MG Series" and ball screws "Super S Series" suitable for the semiconductor and FPD industries, we also offer wafer transport robots, EFEM, wafer aligners, and ultra-precision stages at the nano level. At this exhibition, we will showcase mechanical component parts such as stainless steel linear guideways and ball screws optimal for the semiconductor industry, as well as wafer transport robots, wafer aligners, and wafer load/unload systems. The wafer load/unload system is equipped with a double-arm wafer transport robot and wafer aligner. It is a compact model that contributes to improved space efficiency and work efficiency.