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Semiconductor Subsystem Solution

We can provide everything from components to subsystems for semiconductor manufacturing equipment.

Our company is engaged in a wide range of development and manufacturing, from mechanical component parts to mechatronic products. We offer stainless steel linear guideways "MG Series" and ball screws "Super S Series," suitable for the semiconductor and FPD industries, as well as wafer transport robots, EFEM, wafer aligners, and ultra-precision stages at the nano level. We provide everything from components to subsystems in a one-stop solution, significantly reducing costs and man-hours related to procurement. 【We will be exhibiting at SEMICON Japan】 We plan to showcase mechanical component parts such as stainless steel linear guideways and ball screws for semiconductor equipment, as well as wafer robots and wafer load/unload systems. Please feel free to stop by. Date: December 13 (Wed) to 15 (Fri), 2023 Venue: Tokyo Big Sight (Booth No.: East Hall No. 2309)

SEMICON Japan Official Website

basic information

■All-in-one products for semiconductor manufacturing equipment We can provide not only components but also subsystems. Among them, the wafer transport robot is equipped with our DD motors and high-rigidity cross roller bearings. Major components are covered by our products, achieving both high performance and affordability. ■Comprehensive technical support We have established "Robot Technology Centers" in Kobe and Tokyo as bases for manufacturing support. Our technical staff assist with demonstration experiments and proof of concept (PoC) verifications, which can often become bottlenecks. We also offer teaching and sample programs, and maintenance personnel can receive special training in accordance with regulations.

Price range

Delivery Time

Model number/Brand name

HIWIN Wafer Transport Robot Wafer Aligner Load Port

Applications/Examples of results

Semiconductor industry, LED industry, FPD industry, etc.

Detailed information

Wafer Transport Robot Catalog

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Wafers Road Port Catalog

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Slim DD Motor [DM-T Series] Brochure

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Linear Guideway Technical Information

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Ball Screw Technical Information

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Direct Drive Motor [DMH Series]

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