Probe Card Inspection "AOP-PCI"
High-precision 3D surface measurement to meet the demands of complex surface measurements.
AOP-PCI (Probe Card Inspection) is a multifunctional, non-contact, non-destructive inspection tool designed to comprehensively check probe cards. By combining an air bearing stage with state-of-the-art sensors and vision systems, it can obtain high-precision data on the tips, head shapes, and PCB surfaces of full-size square direct dock probe cards. Additionally, dedicated measurement algorithms enable seamless execution of both data acquisition and analysis routines. *For more details, please refer to the PDF materials or feel free to contact us.*
basic information
Resolution: Horizontal resolution: 1 μm or more, vertical resolution: 1 nm or more Scan speed: Processing time for 30 x 30 mm probe chip array: less than 4 minutes (high resolution), processing time for 80 x 80 mm probe head shape: less than 3 minutes (low resolution) Dimensions: Made to order Changeover time (between different types of probe cards): less than 2 minutes *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Model number/Brand name
AOP-PCI
Applications/Examples of results
<Representative Applications> • Probe chip/pin inspection Height, diameter, misalignment, presence, debris/particles, coplanarity, damage, tilt • Probe head inspection - loose/chipped screws Contour, shape, debris/particles, detection of defects/damage • PCB inspection Shape, missing components, coplanarity, debris/particles, defects • Probe mark inspection Depth, position, damage to pad edges, shape, particles *For more details, please refer to the PDF document or feel free to contact us.