Large-diameter imaging SIMS using RAE detectors

SIMS: Secondary Ion Mass Spectrometry

last updated Mar 12, 2025

[Analysis Case] TMAH Analysis Case in Si-containing Solution by IC Method

The measurement of amines is possible using the IC (Ion Chromatography) method.

last updated Mar 13, 2025

[Analysis Case] Analysis of Organic Acids in Solution by IC Method

Qualitative and quantitative analysis of organic acids in solution is possible.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Copper (Cu) Oxide Film Thickness: Differences Due to Storage Environment

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Layer Structure and Film Thickness of Naturally Oxidized Copper (Cu) Surface Film

Depth-direction state evaluation using TOF-SIMS.

last updated Mar 13, 2025

Precautions for Low-Temperature Photoluminescence Measurement

Photoluminescence method

last updated Mar 12, 2025

[Analysis Case] Removal of Organic Contaminants by Etching

We will remove surface contamination and conduct an evaluation using XPS.

last updated Mar 13, 2025

Valence evaluation of metal oxides by chemical shift

XPS: X-ray Photoelectron Spectroscopy

last updated Mar 12, 2025

[Analysis Case] Atomic Column Observation of Strontium Titanate SrTiO3

High-resolution STEM observation using Cs-corrected STEM

last updated Mar 13, 2025

Extreme point measurement

XRD: X-ray diffraction method

last updated Mar 12, 2025

Types and Characteristics of Electron Diffraction

TEM: Transmission Electron Microscopy

last updated Mar 12, 2025

Detection of trace components by P&T of volatile organic compounds (VOCs)

GC/MS: Gas Chromatography-Mass Spectrometry

last updated Mar 12, 2025

[Analysis Case] Evaluation of Nitrogen Components in Solution

It is possible to analyze inorganic nitrogen by form.

last updated Mar 13, 2025

[Analysis Case] Surface Contamination Assessment of Si Wafers Stored Using TOF-SIMS

Evaluation of contamination and oxidation of Si wafers after removing the oxide film with hydrofluoric acid treatment.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Nickel Plating Peel-off Surface by TOF-SIMS

Investigation of the causes of coating peeling and poor adhesion through TOF-SIMS analysis.

last updated Mar 13, 2025

High-precision quantitative evaluation of impurities in SiGe.

SIMS: Secondary Ion Mass Spectrometry

last updated Mar 12, 2025

[Analysis Case] Evaluation of the Condition of Foreign Matter with Surface Oxidation Film

Evaluation of aluminum hydroxide Al(OH)3 and aluminum oxide Al2O3 is possible.

last updated Mar 13, 2025

[Analysis Case] Low-Temperature PL Spectrum of Si After Ion Implantation Annealing Treatment

It is possible to confirm the recovery of crystallinity due to irradiation defects and annealing.

last updated Mar 13, 2025

[Analysis Case] Analysis of Corrosive Components in Indoor Atmosphere

It is possible to analyze ion components in the atmosphere using the impinger collection method.

last updated Mar 13, 2025

[Analysis Case] Composition and Thickness Evaluation of Ultra-Thin SiON Films

Estimation of film thickness using the average free path of photoelectrons.

last updated Mar 13, 2025

Improvement of depth resolution by vertical incidence method.

SIMS: Secondary Ion Mass Spectrometry

last updated Mar 12, 2025

Distortion evaluation using SEM equipment

EBSD: Electron Backscatter Diffraction

last updated Mar 12, 2025

[Analysis Case] Quantification of Interstitial Atom Concentration in Silicon Single Crystals

Quantitative analysis of interstitial oxygen and carbon concentration non-destructively using infrared absorption method.

last updated Mar 13, 2025

Pre-treatment and measurement under high purity atmosphere.

XPS: X-ray photoelectron spectroscopy, etc.

last updated Mar 12, 2025

FIB low acceleration processing

FIB: Focused Ion Beam Processing

last updated Mar 12, 2025

[Analysis Case] Composite Analysis of White Powder

Identification of powders by FT-IR analysis and XRF analysis.

last updated Mar 13, 2025

[Analysis Case] Evaluation of SiON Film by SIMS

Evaluation of nitrogen in SiON with a film thickness of approximately 1 nm is possible.

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Depth Distribution of B near the Si Surface using SIMS

High-precision B profile analysis through sample cooling.

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Diffusion Layer Structure of Bipolar Transistors

Clearly observable structure of the diffusion layer including pn junction determination.

last updated Mar 13, 2025

[Analysis Case] Structural Evaluation of Fine Transistors

High-resolution TEM observation using Cs-corrected TEM

last updated Mar 13, 2025