Points to consider in foreign matter analysis of AES.

AES: Auger Electron Spectroscopy

last updated Mar 12, 2025

[Analysis Case] Evaluation of Element Distribution in Oxide ReRAM Operating Area Using SIMS

High-sensitivity evaluation of local elemental distribution in oxide devices using oxygen isotopes.

last updated Mar 13, 2025

X-ray diffraction measurement using a 2D detector

XRD: X-ray diffraction method

last updated Mar 12, 2025

[Analysis Case] Preprocessing Technology for Specific Areas of Wafers and Chips

We will sample only the target area and produce samples without breaking the wafer.

last updated Mar 13, 2025

[Analysis Case] Ultra-high Sensitivity Measurement of Impurities in Silicon Using SIMS

We will enhance the sensitivity and evaluate the concentration distribution at the ppt level.

last updated Mar 13, 2025

[Analysis Case] Three-Dimensional Distribution Evaluation of Dopants in MEMS Using SIMS

Imaging SIMS allows for the visualization of concentration distributions of trace elements in micro-regions.

last updated Mar 13, 2025

What is a HAADF-STEM image?

HAADF-STEM: High-Angle Annular Dark Field Scanning Transmission Electron Microscopy

last updated Mar 12, 2025

[Analysis Case] Investigation of Defective Bipolar Transistors (IGBT)

Identification of failure locations using an emission microscope with a high voltage power supply.

last updated Mar 13, 2025

[Analysis Case] High-Sensitivity Analysis of Light Elements in Semiconductor Substrates Using SIMS

SIMS analysis allows for the evaluation of elements such as H, C, N, O, and F down to levels below 1 ppm.

last updated Mar 13, 2025

[Analysis Case] Contamination Assessment of Si Wafer Bevel Area

It is possible to evaluate both metal components and organic components simultaneously.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Depth Distribution of Alkali Metals in SiO2 Using SIMS

High-precision distribution evaluation of alkali metals through sample cooling.

last updated Mar 13, 2025

[Analysis Case] Identification of the Crystal Structure and Calculation of the Composition Ratio of HfZrOx Film

More detailed evaluation is possible through combined analysis using XRD and XAFS.

last updated Mar 13, 2025

[Analysis Case] Qualitative and Imaging Analysis of Micro Areas Using TOF-SIMS

Qualitative and imaging analysis of foreign substances in the sub-micrometer order and micro-regions is possible.

last updated Mar 13, 2025

[Analysis Case] TOF-SIMS Analysis of Solder Separation Cross Section

It is possible to evaluate the distribution of inorganic and organic substances in microdomains.

last updated Mar 13, 2025

[Analysis Case] Estimation of Detachment Components by TDS

We will compare the outgassing patterns of multiple masses.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Cu Surface Discoloration Using AES and SEM-EDX

It is possible to perform elemental analysis with a shallow detection depth while conducting SEM observation.

last updated Mar 13, 2025

[Analysis Case] Image Analysis of Micro Beer

It is possible to evaluate the distribution of micro-regions.

last updated Mar 13, 2025

Comparison of depth profiling analysis using XPS and AES.

XPS: X-ray Photoelectron Spectroscopy AES: Auger Electron Spectroscopy

last updated Mar 12, 2025

[Analysis Case] Evaluation of Organic Contamination of Wafers in Wafer Cases

You can evaluate the causes and total amount of organic contamination in the manufacturing process.

last updated Mar 13, 2025

Examples of TDS analysis by representative materials and purposes

TDS: Thermal Desorption Gas Analysis Method

last updated Mar 12, 2025

[Analysis Case] Structural Analysis of Silicon Dioxide

Structural analysis of amorphous silicon dioxide (SiO2) using Raman scattering spectroscopy.

last updated Mar 13, 2025

Spherical aberration correction function

TEM: Transmission Electron Microscopy

last updated Mar 12, 2025

[Analysis Case] Investigation of Watermark Causes

Identification of contamination sources on the outermost surface using TOF-SIMS.

last updated Mar 13, 2025

[Analysis Case] Identification of Pyrolysis Products by High-Temperature XRD

XRD measurement can be performed while increasing the temperature.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Metal Films by High-Temperature XRD

Tracking evaluation of phase transitions and crystallinity changes during the heating process.

last updated Mar 13, 2025

[Analysis Case] Analysis of Microscopic Contaminants on Wafer Surface

Composition analysis of 30nm size is possible without processing.

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Fracture Surface of Laminated Samples by AES Analysis

Visualizing a 50nm thin film with a cross-sectional sample.

last updated Mar 13, 2025

[Analysis Case] Residue Analysis of Cotton Swabs with Ethanol

Analysis of stains and cleaning residues that are not visible under an optical microscope is possible using TOF-SIMS.

last updated Mar 13, 2025

[Analysis Case] Thermal Desorption Gas Analysis of SiN Film by TDS

It is possible to evaluate the surface-adsorbed gas on the thin film and the desorbed gas from within the film.

last updated Mar 13, 2025

[Analysis Case] Degassing Evaluation of Plating Samples

Thermal Desorption Gas Analysis of Ni/Au Plating (TDS)

last updated Mar 13, 2025