[Analysis Case] Wide-Area Cross-Section Observation of Bumps

Wide-area observation of micro-specific locations is possible through cross-section preparation using ion polishing.

last updated Mar 13, 2025

[Analysis Case] Discrimination between Anatase and Rutile Types of Titanium Dioxide

TEM-EELS enables elemental identification and chemical state analysis in micro-regions.

last updated Mar 13, 2025

[Analysis Case] Contamination Assessment of Si Wafer Bevel Area

It is possible to evaluate both metal components and organic components simultaneously.

last updated Mar 13, 2025

[Analysis Case] Measurement of Film Density and Film Thickness of Organic EL Device Stacked Films

X-ray reflectivity measurement (XRR) allows for non-destructive analysis of film thickness and density.

last updated Sep 17, 2025

[Analysis Case] Evaluation of Composition and Impurity Distribution of ZnO Films by SIMS

Visualization of in-plane distribution through imaging SIMS analysis.

last updated Mar 13, 2025

[Analysis Case] Evaluation of SiON Film by SIMS

Evaluation of nitrogen in SiON with a film thickness of approximately 1 nm is possible.

last updated Mar 13, 2025

[Analysis Case] Evaluation of B Penetration Amount from SSDP-SIMS Gate to Substrate

Measurement avoiding the effects of surface irregularities and high concentration layers using SSDP-SIMS.

last updated Mar 13, 2025

[Analysis Case] Component Analysis of Organic EL Devices

TOF-SIMS component analysis of slope-polished organic multilayer structure samples.

last updated Oct 03, 2025

[Analysis Case] Distortion Analysis in the Field of Element Separation

NBD: Strain analysis of micro-regions using Nano Beam Diffraction.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Ultra-Shallow Implant Profiles by SIMS

Evaluation of dopant distribution and junctions is possible even in extremely shallow regions.

last updated Mar 13, 2025

[Analysis Case] High-Precision Analysis of Ultra-Shallow Dopant Distribution Using SIMS

Can be evaluated with high reproducibility.

last updated Mar 13, 2025

[Analysis Case] Structural Observation of the Hall Side Wall ONO Film

Planar TEM observation of specific areas using the FIB method.

last updated Mar 13, 2025

[Analysis Case] Structural Analysis of Silicon Dioxide

Structural analysis of amorphous silicon dioxide (SiO2) using Raman scattering spectroscopy.

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Depth Direction State of Stainless Steel Passive Film

Waveform analysis and evaluation of the depth distribution of bonding states by Ar sputtering.

last updated Sep 17, 2025

[Analysis Case] Composition and Thickness Evaluation of Ultra-Thin SiON Films

Estimation of film thickness using the average free path of photoelectrons.

last updated Sep 17, 2025

FIB low acceleration processing

FIB: Focused Ion Beam Processing

last updated Mar 12, 2025

Pre-treatment and measurement under high purity atmosphere.

XPS: X-ray photoelectron spectroscopy, etc.

last updated Mar 12, 2025

Spherical aberration correction function

TEM: Transmission Electron Microscopy

last updated Mar 12, 2025

Distortion evaluation using SEM equipment

EBSD: Electron Backscatter Diffraction

last updated Mar 12, 2025

Micro-sampling method

FIB: Focused Ion Beam Processing

last updated Mar 12, 2025

Improvement of depth resolution by vertical incidence method.

SIMS: Secondary Ion Mass Spectrometry

last updated Mar 12, 2025

Flow from the request

I have summarized the process from request to delivery.

last updated Mar 14, 2025

Frequently Asked Questions (FAQ) About Samples

We have compiled frequently asked questions about the sample in an FAQ format.

last updated Mar 14, 2025

Frequently Asked Questions (FAQ) About Orders

We have compiled frequently asked questions regarding your order in an FAQ format.

last updated Mar 14, 2025

How to send a sample

I have summarized how to send samples for analysis to MST.

last updated Mar 14, 2025

[TDS] Thermal Desorption Gas Analysis Method

A mass spectrometry method that allows monitoring of gases generated by vacuum heating/warming at different temperatures, with high sensitivity for detecting hydrogen and water.

last updated Mar 12, 2025

Photoluminescence method

PL：PhotoLuminescence

last updated Mar 12, 2025