AeroFix for Wafer Protection in Semiconductor Manufacturing
Achieving stable adhesion without deflection for wafer protection.
In the semiconductor manufacturing industry, the wafer protection process requires precise fixation to prevent fine scratches and contamination. Particularly when handling thin and delicate wafers, there have been cases where the warping caused by the material being drawn into the air release holes of conventional vacuum chuck products has led to quality issues. Our high-precision porous ceramic vacuum chuck, "Aerofix," was developed to address such challenges. It enables partial adsorption without warping, stabilizing and protecting the wafer. 【Usage Scenarios】 - Transporting and fixing wafers - Processes requiring precise positioning 【Benefits of Implementation】 - Reduces the occurrence of suction marks on wafers - Ensures stable adsorption of delicate materials
basic information
【Features】 - No deflection during partial adhesion - Capable of handling large areas - No dust generation - No static electricity generation - High cost performance 【Our Strengths】 We manufacture and sell special grinding wheels, vacuum suction plates, and surface grinding machines, and we also offer contract processing services for precision grinding, polishing, and dicing. With many years of experience and high technical capabilities, we respond to our customers' diverse needs. We provide products and services that contribute to solving customer challenges, including our high-precision porous ceramic vacuum chuck "Aerofix." Please feel free to contact us with your requests.
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Model number/Brand name
Aerofix
Applications/Examples of results
【Purpose】 ■Fixing devices: Solving problems with high technical skills *For more details, please refer to the PDF document or feel free to contact us.
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Our company is engaged in the manufacturing and sales of special grinding stones, vacuum suction plates, and surface grinding machines, as well as contract processing services for precision grinding, polishing, and dicing. We also handle high-precision porous ceramic vacuum chucks, such as "Aerofix." Please feel free to contact us if you have any inquiries.