Significantly reduce slurry adhesion! Reduce maintenance labor for CMP equipment.
"Easy cleaning with just water washing" - Excellent non-stick properties thoroughly prevent slurry adhesion. Significantly reduces cleaning time and maximizes equipment operating rate!
A major bottleneck hindering the stable operation of semiconductor manufacturing lines is the "cleaning and maintenance work of slurry that has adhered to equipment parts." ■ The problem of slurry adhesion troubling the site The polishing slurry that splashes during processes such as CMP (Chemical Mechanical Polishing) in semiconductor manufacturing strongly adheres to the surface of parts over time, consuming a significant amount of time and labor for cleaning in clean rooms. Regular line stoppages (downtime) associated with maintenance become a cause of reduced productivity for the entire factory. ■ Fluoropolymer PFA coating that drastically reduces maintenance labor and downtime By applying a PFA coating with extremely low surface energy (high non-stick properties), we can prevent the strong adhesion of slurry. This achieves excellent cleanability, allowing for easy removal even if it adheres. As scraping off the adhered material becomes unnecessary, it can be quickly removed by simply rinsing, dramatically shortening maintenance time. This increases the average time between failures (MTBF) of the equipment and contributes to improved continuous operation rates and reduced burden on operators.
basic information
【Functional Characteristics】 ■ Outstanding release properties and cleanliness Effectively prevents the adhesion of slurry and chemical stains. ■ Excellent chemical resistance Prevents coating degradation from acidic and alkaline cleaning solutions. ■ Superior durability Maintains non-stick effect even after repeated cleaning and rinsing. 【Specification Overview】 ■ Treatment Name: High-Performance PFA Coating ■ Heat Resistance: Continuous use temperature approximately 260°C (suitable for harsh thermal and chemical cleaning). ■ Applicable Parts: Covers around CMP equipment, receiving trays, nozzle parts, and various jigs. 【Construction System】 ■ Uniform coating for complex three-dimensional shapes and internal flow paths. ■ Optimal coating thickness and specifications designed according to application and cleaning environment (used cleaning solutions).
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Model number/Brand name
Fluororesin coating
Applications/Examples of results
【Application】 ■ General automation device components that are prone to splashing and adhering slurry or highly viscous liquids ■ Covers for CMP equipment, drain pans, piping channels, and frequently maintained mechanical components 【Adoption Results and Implementation Effects】 ■ Issue: Cleaning dried slurry adhered to CMP equipment parts took a long time, resulting in extended equipment downtime due to maintenance. ■ After Implementation: PFA coating was applied to the splashing area and head parts. Even if slurry adhered, it could be easily rinsed off with water, eliminating the need for stubborn residue removal. ■ Effect: Maintenance time in the clean room was dramatically reduced. The equipment operating rate (MTBF) significantly improved, achieving a reduction in maintenance man-hours.
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Nikken Coating Industry Co., Ltd. has been a specialized manufacturer of functional coatings for contract processing, earning the trust of customers across various industries for 79 years since its founding. We leverage our processing technology to maximize the properties of fluororesins, such as non-stick, lubricity, and chemical resistance, providing high-performance coatings that directly address customer challenges, including "Thermo Pro Release" for thermal welding processes and "NonStick STC" for blades and precision molds. In recent years, in response to movements regarding regulations on fluorinated compounds (PFAS), "PEEK resin," which is gaining attention as a substitute for fluororesins, has become a focus. Nikken Coating Industry commercialized the world's first PEEK resin coating, "PEEKCOAT," in 1999. Based on the solid knowledge and know-how accumulated over more than 20 years, we are further intensifying our research and development efforts to explore the potential of next-generation PEEK coatings! We aim to be recognized as "the go-to for PEEK coatings" and will continue to lead the way. As "the best partner for functional coatings that builds trust through technology," Nikken Coating Industry will continue to contribute to the creation of high-quality, high-performance products.