[P-725.xCDE2 Focus Scanner for Semiconductor Inspection]
High-precision Z-focus scanner for semiconductor inspection equipment with sub-nanometer resolution and maximum 800 µm stroke capability.
In semiconductor inspection equipment, high-resolution Z-axis position control and rapid step motion are required for detecting fine defects and evaluating 3D focus. The P-725.xCDE2 PIFOC focus scanner is a high-precision actuator that achieves sub-nanometer resolution with a maximum focus range of 800 µm. By combining the PICMA piezo actuator with a flexure guide mechanism that incorporates capacitive sensors, high linearity, reproducibility, and stability are realized. This enables high-precision control of Z focus and high-speed scanning in semiconductor inspection, contributing to improved accuracy in the inspection process and enhanced throughput of the equipment. [Application Scenarios] - Z focus control for wafer surface defect inspection - High-resolution imaging in chip and package inspection - High-speed Z scanning in optical and laser-based inspection equipment - Defect analysis using optical inspection and confocal optical microscopy [Benefits of Implementation] - Improved measurement accuracy through high-precision focus control - Enhanced inspection throughput due to rapid Z step motion - Increased reliability of the equipment with stable long-term operation
basic information
**Features** - Stroke: 100µm, 400µm, 800µm - Built-in capacitive sensor - Optimal for high-dynamics operation due to high rigidity - Flexibility of cables - Wide range of installation methods **Our Strengths** Based on over 50 years of experience at our headquarters in Germany and 30 years of experience with our Japanese subsidiary, we provide precision positioning solutions that best meet our customers' needs. We offer a wide product lineup, including piezo stages, and can propose integrated systems that contribute to solving our customers' challenges.
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Model number/Brand name
P-725.xCDE2
Applications/Examples of results
- Various types of microscopes (confocal, light sheet, super-resolution, two-photon, etc.) - 3D imaging - Screening - Interferometric measurement devices - High-precision measurement - Autofocus system - Biotechnology - Semiconductor inspection, etc.
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Line up（3）
| Model number | overview |
|---|---|
| P-725.1CDE2 | PIFOC piezo nanofocusing system for long travel ranges and fast step-and-settle, 100 µm, capacitive sensors, D-sub connectors |
| P-725.4CDE2 | PIFOC piezo nanofocusing system for long travel ranges and fast step-and-settle, 400 µm, capacitive sensors, D-sub connectors |
| P-725.8CDE2 | PIFOC piezo nanofocusing system for long travel ranges and fast step-and-settle, 800 µm, capacitive sensors, D-sub connectors |
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.