PIMars XYZ Axis Aperture Piezo Stage for Microscopes
PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.
In high-resolution observation using electron microscopes (SEM/TEM), the positioning accuracy of the sample affects image quality. Even slight vibrations or crosstalk can impact measurement precision, making a high-rigidity and high-response positioning stage essential. The P-561, P-562, P-563, and PIMars Nanopositioning Stages achieve high precision and positioning stability through capacitive sensors. The operational range is 100/200/300 µm in each XYZ direction (depending on the model), with a reproducibility of ±2nm and linearity of 0.03%. [Application Scenarios] - Sample positioning in electron microscope observation - Semiconductor inspection - Super-resolution microscopy - Photonics alignment [Benefits of Implementation] - Improved observation accuracy through precise positioning at the nanoscale - Efficient observation enabled by high resolution and fast response - Stable operation achieved through high reliability and long lifespan
basic information
**Features** - Improved responsiveness through parallel control/measurement structure / Precise multi-axis control - Operating axes: XYZ axes - Stroke: 100µm, 200µm, 300µm types - High linearity with capacitive sensors - Precision flexure guide system with no friction - Center opening 66 x 66mm **Our Strengths** Based on precision control technology cultivated over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we propose optimal solutions to meet our customers' needs.
Price information
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Model number/Brand name
P-561・P-562・P-563 PIMars(TM) XYZ Piezo System
Applications/Examples of results
Application examples - Scanning electron microscope - Mask/wafer alignment - Interferometer - Various measurements - Biotechnology - Micromanipulation
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.