[For Measurement] XYZ Axis Precision Positioning Stage P-561~563
PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.
In high-precision measurement, the positioning accuracy of the probe affects the reliability of the measurement results. Even slight vibrations or crosstalk can be sources of error, necessitating stable nanopositioning achieved through high rigidity and closed-loop control. The P-561, P-562, and P-563 PIMars Nanopositioning Stages are XYZ multi-axis piezo flexure stages that utilize a parallel kinematics structure and capacitive sensors. They achieve a reproducibility of ±2 nm and linearity of 0.03%, enabling high-precision probe positioning with low crosstalk. With high resonance frequency and excellent dynamic characteristics, they are suitable for high-speed scanning measurements and micro-displacement measurements. They are ideal for precision measurement applications such as semiconductor inspection and nanomaterial analysis. 【Application Scenarios】 - Semiconductor inspection - Super-resolution microscopy - Photonics alignment 【Benefits of Implementation】 - Achievement of high-precision measurement results - Reduction of measurement time - Improvement of product quality
basic information
【Features】 - Improved responsiveness through parallel control/measurement structure / precise multi-axis control - Motion axes: XYZ axes - Stroke: 100µm, 200µm, 300µm types - High linearity with capacitive sensors - Precision flexure guide system with no friction - Center opening 66 x 66mm 【Our Strengths】 Based on precision control technology cultivated over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we propose optimal solutions to meet our customers' needs.
Price information
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Model number/Brand name
P-561・P-562・P-563 PIMars(TM) XYZ Piezo System
Applications/Examples of results
Application examples - Scanning electron microscope - Mask/Wafer alignment - Interferometer - Various measurements - Biotechnology - Micromanipulation
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.