Actuator with 50N high thrust and vacuum specifications for semiconductor testing.
Maximum 12 mm/s, 50 N high thrust. Sub-nanometer resolution PICMAWalk actuator ideal for semiconductor inspection processes.
In the semiconductor manufacturing industry, high-precision control in the positioning of wafers and masks is essential due to the advancement of manufacturing processes. Particularly in fine processing and inspection stages, accurate positioning at the nanometer level significantly affects product quality and yield. Low positioning accuracy can lead to the occurrence of defective products and a decrease in manufacturing efficiency. The N-331 PICMAWalk is an embedded linear actuator that combines high thrust of up to 50 N with sub-nanometer resolution. It supports high-speed operation of up to 12 mm/s, contributing to the reduction of takt time in inspection equipment. The friction drive mechanism allows for position holding even when the power is off. Additionally, its vacuum-compatible specifications make it suitable for use in semiconductor inspection equipment and clean environments. 【Application Scenarios】 - Wafer positioning in semiconductor manufacturing equipment - Positioning in mask aligners - High-precision positioning in inspection equipment 【Benefits of Implementation】 - Achieves high-precision positioning at the nanometer level - Contributes to improved quality and yield in manufacturing processes - Usable in vacuum environments For details on thrust characteristics, other specifications, and vacuum-compatible options, please refer to the catalog.
basic information
【Features】 - Robust walking drive with PICMA technology - Variable runner length: 25mm to 100mm - Accurate positioning of loads up to 5kg with nanometer precision - Suitable decoupling load of up to 2kg 【Our Strengths】 Based on precision control technology developed over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.
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Model number/Brand name
N-331
Applications/Examples of results
【Applications】 ■Microscopes ■Use in automation ■Photonics *For more details, please refer to the PDF document or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.