High-speed camera 'CHRomatic Vision Camera'
This is a high-speed, high-precision line camera for inline appearance inspection, also suitable for wafer inspection applications.
The "CHRomatic Vision Camera" is a line camera for high-speed appearance inspection. Utilizing the principle of chromatic aberration confocal, it has a wide depth of field of up to 3mm. Focusing is unnecessary, allowing for high-contrast images to be captured even on uneven surfaces. It can obtain two-dimensional images. Additionally, with a high-speed scan of up to 140kHz, inline appearance inspection (for shape defects such as cracks and scratches, as well as foreign object inspection) is possible. 【Features】 ■ High resolution XY 0.9um~2.9um (the 3mm depth of field type is 2.9um) ■ High contrast for various materials ■ High speed and resistant to vibration ■ Contributes to reduced development costs and shortened development lead times, with a software development kit (DLL, etc.) available for device integration. Interfaces such as CameraLink and GigE are supported. ■ Proven results in appearance inspection for semiconductors, consumer electronics, and glass. *For more details, please refer to the materials. Feel free to contact us with any inquiries.
basic information
【Excellent Performance】 ■ Maximum Data Acquisition: 100kHz (200MPixel/sec) ■ Depth of Focus: 150μm to 3mm ■ Resolution: 1 to 5μm *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Keywords: Applications, Measurement Items, Benefits, etc.] Non-contact sensors, optical sensors, confocal, shape, measurement, inspection, high speed, two-dimensional, small, compact, high precision, line cameras, inline, monitoring, in-situ, during processing, before and after processing, embedded, semiconductor, wafer, Si wafer, Si, weld joints, coating, film, flip chip, transparent, transparent bodies, black, glossy, mirror finish, easy.
