[Data] Non-contact thickness and shape measurement sensor
Many measurement examples are included! We are introducing CHRocodile's applications for semiconductors.
This document provides information about non-contact thickness and shape measurement sensors. It introduces topics such as "The Principle of the CHROMATIC VISION CAMERA," "Measurement Examples," and "Features and Advantages of CHRocodile." Please take a moment to read it. 【Contents (Excerpt)】 ■ White Light Sensor ■ CHRocodile C ■ Interference Sensor ■ CHROMATIC VISION CAMERA ■ FLYING SPOT SCANNER *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Other Publication Contents (Excerpt)】 ■Example 1: Si thickness measurement data during wafer in-process: Spectroscopic interference type Si thickness ■Advantages of wafer in-situ process based on the principle of spectroscopic interference ■Example 2: Si thickness measurement data during wafer in-process: Step height (thickness) using chromatic aberration confocal ■Advantages of wafer in-situ process based on the principle of chromatic aberration confocal ■Measurement Example 3: Shape measurement of bump wafers *For more details, please refer to the PDF document or feel free to contact us.
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[Keywords: Applications, Measurement Items, Benefits, etc.] Non-contact, optical sensor, confocal, spectral interference method, thickness, thin film, thick film, gap, height, surface roughness, flatness, TTV, shape, appearance, edge, slope, measurement, inspection, high speed, 3D, line sensor, line scan, area scan, full surface, compact, inexpensive, high precision, inline, monitoring, in-situ, during processing, before and after processing, polishing, offline, tabletop machine, sampling, embedded, semiconductor, wafer, wafer bonding, Si wafer, Si, GaAs, InP, SiC, LiNbO3 (LN), LiTaO3 (LT), GaN, SiP, Al2O3 (sapphire), CMM, weld joint, glass, quartz glass, silicate glass (medical ampoules), display glass, car windshield, PCB, medical balloon, barrier film, PET film, coating, film, multilayer film, applied film, conformal coating, electrode layer coating, stent coating, polyimide, PVB, resin material, flux, adhesive, insulating film, air layer, dicing groove, flip chip, wire bond, micro bump, transparent, transparent body, black, glossy, mirror finish, easy.
