Pre-CMP slurry: Reducing CMP process time
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Softly controlling the hard! A slurry for polishing hard substrates blended with silica and diamond. By using it before CMP, it shortens the process time.
This is a recommended pre-CPM slurry for polishing hard materials such as sapphire, SiC, and silicon nitride. By using it before CMP, you can shorten the CMP process time. 【Recommended for the following situations】 ■ Those who want to shorten the CMP process time ■ Those who want to efficiently remove fine scratches, etc. ■ Those who want to reduce the load of potassium permanganate slurry *For more details, please feel free to contact us.
basic information
The pre-CMP slurry ULTRA-SOL STD0.5μ20MCH is a neutral pH aqueous slurry blended with high-quality diamond particles and silica. By using it before CMP, it can shorten the CMP process time for difficult-to-process materials such as sapphire, SiC, and silicon nitride. 【Introduction to ULTRA-SOL STD0.5μ20MCH products is now available】 We have created a document summarizing evaluation examples of SiC using ULTRA-SOL STD0.5μ20MCH. For more details, please refer to the catalog at the bottom of the page! *Pre-CMP slurry is a slurry blended with single crystal diamond and colloidal silica. By attacking the surface with diamond abrasives and smoothing it with colloidal silica, it achieves a high processing rate and surface quality. Using it before finishing CMP significantly reduces process time.
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Applications/Examples of results
Polishing of hard materials such as SiC and sapphire.
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Microdiamant, which has contributed to customers through precision classification, has acquired the American CMP-related company Eminess Technology and has become Pureon. In addition to our high-quality diamond-related products, we will also accumulate in-house know-how regarding final finishing CMP. What is important for our customers is the final finish. Even now, we receive inquiries about our diamond polishing because customers want to shorten the CMP process time. In the future, we will comprehensively handle consultations from grinding and polishing to CMP.