Wafer transport robot & pre-aligner repair
Repair of wafer transport robot and pre-aligner
We can repair BROOKS/PRI wafer robots such as ATM105, 407, ABM405, and aligners like BROOKS/PRI PRE200, 300. We also handle repairs for GENMARK wafer robots and aligners, as well as other Japanese models like YASKAWA upon consultation. This includes repair work at our own factory and pre-shipment inspections.
basic information
Proposal for repairs or replacement machines for BROOKS/PRI ATM105, 407, ABM405 wafer robots and BROOKS/PRI PRE200, 300 aligners.
Price information
Once we receive the device from the customer, we will provide an initial estimate based on the requested repair details and symptoms.
Delivery Time
Model number/Brand name
BROOKS/PRI ATM105, 407, ABM405 wafer robots; BROOKS/PRI PRE200, 300 aligners.
Applications/Examples of results
Repair of various wafer robots and pre-aligners associated with legacy semiconductor equipment, or proposals for replacement machines. In-house repair center with pre-shipment inspection and report submission for repaired items. We already have a track record with many semiconductor manufacturers.
