□■□ Substrate Heating Heater □■□

The substrate heating heater allows for the selection of front plate materials such as "aluminum nitride," "boron nitride," "Inconel," and "quartz," and offers a wide variety of heater elements including NiCr, Kanthal, graphite, CC composite, and various coated products. We propose a substrate heating unit that can be freely customized in terms of housing, electrode structure, and cooling structure to match the process atmosphere. This substrate heating heater unit excels in ultra-high temperature firing, heating efficiency, uniformity, and temperature reproducibility. It is compatible with all types of equipment configurations, including semiconductor manufacturing equipment, CVD, PVD (evaporation, sputtering, PLD, ALD), and high-temperature annealing devices.