Pressure-independent MFC "MARU7000s"
Achieves excellent corrosion resistance and leak characteristics through EP processing! A pressure-independent MFC that demonstrates outstanding flow stability.
The "MARU7000s" is a thermal + pressure sensor-based MFC that ensures excellent corrosion resistance and leak characteristics while demonstrating high flow stability. This product achieves high corrosion resistance and leak characteristics through EP treatment. Furthermore, it exhibits excellent flow stability due to its PI function, enabling superior crosstalk control. It features pressure insensitivity (pressure independence) and allows for the selection of valve types suitable for medium to large flow, such as Solenoid Valves, or for small to heavy flow, such as Piezo Valves. As a product portfolio built on domestic technology, it provides mass flow total solutions across various fields, including semiconductors, displays, and general industries. 【Features】 ■ Excellent corrosion resistance and leak performance with EP treatment ■ Superior flow stability with PI function ■ Excellent crosstalk control *For more details, please download the PDF or feel free to contact us.
basic information
【Specifications (Partial)】 ■Flow Range: 5 SCCM to 200 SLM ■Flow Control Range: 2 to 100% of Full Scale ■Pressure Sensitivity: ≦±2% of Full Scale up/down to 10 psi/Sec ■Accuracy: ≦±0.25% of Full Scale (2% to 25%), ≦±1.0% of Set Point (25% to 100%) ■Response Time: ≦1.0 Sec ■Reproducibility: ≦±0.15% of Full Scale *For more details, please download the PDF or feel free to contact us.
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【Applications】 ■Semiconductors: Memory (DRAM, NAND), Foundry, System LSI ■General Industry: Chemical, Measurement, Shipbuilding, Steel, Medical ■Energy: Solar Energy, Fuel Cell, Oil Refining ■Display: LCD, AMOLED, OLED, LED *For more details, please download the PDF or feel free to contact us.
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Founded in 1992 with the purpose of "serving the world," we have been importing and selling automatic control devices, which are core components of the factory automation industry, and have continued to grow based on the trust of our customers.