Thickness measurement - Optical sensor 'CHRocodile 2LR ver2'

Non-contact optical thickness measurement. Applicable even for thickness measurements of semiconductor wafers where high precision is required.

The new product "CHRocodile 2LR ver2" is a device that can non-contact measure the thickness of materials such as wafers and coatings. It adopts a new detector different from the previous "CHRocodile 2LR," allowing for approximately twice the thickness measurement range and more precise measurements. It can also be applied inline, and the CHRocodile 2LR has a proven track record with many customers. It is capable of measuring the thickness of semiconductor wafers like Si, as well as films, resins, glass, and solar cells. It supports interference film thickness of up to 16 layers. 【Features】　■ Wide thickness measurement range, compatible with various materials 　　　With a rich lineup of probes, it covers thicknesses from thin films (around 32μm) to thick films (3900μm). (The high-precision measurement range is 16~1900μm with linearity of 0.35μm) 　■ High resolution (sub-micron, minimum 1nm) 　■ Contributes to reducing development costs and shortening development lead times, 　　　with a software development kit (DLL, etc.) available for device integration 　■ Extensive track record in the semiconductor industry *For more details, please refer to the documentation.

basic information

【Other Features】 ■Measurement Range: 32μm to 3900μm (n=1, Linearity 1μm) 16μm to 1900μm (n=1, Linearity 0.35μm) ■Resolution: Up to 1nm (n=1) ■Measurement Frequency: 70kHz ■Interface: Ethernet, RS422, Analog (2ch) *For more details, please refer to the PDF document or feel free to contact us.

Price range

Delivery Time

OTHER

Model number/Brand name

CHRocodile 2 LR ver2

Applications/Examples of results

【Applications】 ■Measurement of semiconductor wafer thickness such as Si 　Thickness measurement of films, resins, glass, liquid crystal gap cells, solar cells, etc. 　and measurement of doped wafers. *For more details, please refer to the PDF document or feel free to contact us. 【Keywords related to applications, measurement items, benefits, etc.】 Non-contact sensors, optical sensors, spectroscopic interference method, thickness, thin films, thick films, gaps, shapes, measurement, inspection, high speed, high precision, inline, monitoring, in-situ, during processing, before and after processing, polishing, semiconductors, wafers, wafer bonding, Si wafers, transparent, transparent bodies, gloss, mirror finish, easy.