Evaluation of membrane quality using EELS analysis method
EELS analysis for element identification allows for the comparison of the bonding states of materials!
Our company provides analysis and reliability evaluation services. EELS analysis and EDS analysis are analytical methods used for elemental identification by irradiating accelerated electrons onto TEM samples. In the case of "different carbon films," we conducted film quality evaluation in the nanoscale using the EELS analysis method, which is characterized by state analysis. In the EDS analysis, we detected trace amounts of N and O only in the Bottom film through spectral comparison. In the EELS analysis, the difference in the shoulder shapes of the two spectra allows for a comparison of the bonding states of N, O, and C present in the organic film. *For more details, please refer to the PDF document or feel free to contact us.
basic information
Comparison of EELS Analysis and EDS Analysis <EELS> ■ Parameters used for analysis: Energy loss electrons ■ Energy resolution: Below 1 eV ■ Advantages: State analysis, light element analysis (Li, B) ■ Disadvantages: Difficult to analyze a wide range of elements simultaneously ■ Measurement time: 5 seconds ■ TEM sample thickness: Approximately below 50 nm <EDS> ■ Parameters used for analysis: Characteristic X-rays ■ Energy resolution: Around 100 eV ■ Advantages: Analysis of all elements ■ Disadvantages: Difficult to separate peaks of elements with close energy ■ Measurement time: 30 seconds ■ TEM sample thickness: Approximately below 300 nm *For more details, please refer to the PDF document or feel free to contact us.*
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For more details, please refer to the PDF document or feel free to contact us.
