Tabletop SEM (Scanning Electron Microscope) 'TM3030Plus'
Observation of samples and elemental analysis are possible! It can be utilized not only in the semiconductor and electronic components fields but also in life sciences and biological fields.
We handle the tabletop SEM (scanning electron microscope) 'TM3030Plus' manufactured by Hitachi High-Tech. It has been half a century since SEM observation became common, and it has become an important observation method in various fields. With the "charge reduction mode" of the tabletop SEM, it is possible to observe and analyze samples that cannot be observed with FE-SEM. This capability is applicable not only in the semiconductor and electronic components fields but also in life sciences and biological fields. 【Features】 - For conductive samples such as semiconductors and electronic components, SEM observation is mainly recommended in normal/conductive mode. - For non-conductive samples such as plastics, paper, rubber, ceramics, and biological samples containing moisture or oil, SEM observation in surface/normal/charge prevention mode is recommended. *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications】 ■ Acceleration Voltage: 5kV (surface), 15kV (normal, analysis) ■ Maximum Sample Size: 70mm ■ Maximum Sample Thickness: 50mm ■ Electron Gun: Tungsten Filament ■ Detectors ・High-sensitivity Semiconductor-type Reflective Electron Detector ・High-sensitivity Low Vacuum Secondary Electron Detector ■ Observation Modes ・Conductor (Analysis Mode) ・Standard ・Charge Reduction (Low Vacuum) ■ Analysis Device: Bruker AXS QUANTAX Xflash 430H *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Usage] ■ Not only in the semiconductor and electronic components fields, but also in life sciences and biological fields. *For more details, please refer to the PDF document or feel free to contact us.*