Surface Analysis Guide
Various surface analysis techniques! We will assist you in solving issues such as foreign substances, discoloration, and contamination.
Our company utilizes various surface analysis techniques to assist in resolving issues such as foreign substances, discoloration, and contamination. We conduct a wide range of analyses, from micro-regions to bulk samples, including "EDX," which is energy-dispersive X-ray analysis; "AES," which detects Auger electrons using electron beams; and "XPS," which allows for the analysis of insulators and chemical bonding states. Please feel free to contact us when you need our services. 【Analysis Methods】 ■EDX (EDS): Energy-dispersive X-ray analysis ■AES: Auger electron spectroscopy ■XPS (ESCA): X-ray photoelectron spectroscopy ■TOF-SIMS: Time-of-flight secondary ion mass spectrometry *For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Features of EDX (EDS)】 ■ Element analysis of small areas ■ Analysis of bulk samples ■ Can be used in conjunction with SEM ■ Element mapping *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application Examples】 ■EDX: Analysis of microscopic foreign substances, migration observation ■AES: Analysis of pad discoloration, measurement of oxide film thickness, bonding failure analysis ■XPS: Contamination analysis of substrate surfaces, evaluation of surface oxidation ■TOF-SIMS: Analysis of organic and inorganic contamination, analysis of film-rejecting foreign substances *For more details, please refer to the PDF document or feel free to contact us.
