Energy Dispersive X-ray Spectroscopy (EDS)
Detecting characteristic X-rays! An effective analytical method for obtaining elemental information in micro-regions and small foreign substances.
"Energy Dispersive X-ray Spectroscopy (EDS or EDX)" is a method that detects characteristic X-rays generated by electron beam irradiation using a detector attached to an electron microscope (SEM or TEM), allowing for the acquisition of elemental information about samples or foreign substances. When characteristic X-rays generated by irradiating a material with an electron beam enter the detector, a number of electron-hole pairs equivalent to the energy of the characteristic X-rays are produced. By measuring this number (current), it is possible to determine the energy of the characteristic X-rays, and since the energy varies by element, it is possible to investigate the elemental information of the material. [Analysis by EDS (partial)] ■ Qualitative analysis of intermetallic compounds (point analysis) - By examining which elemental characteristic X-ray energy corresponds to the characteristic X-rays in the measured spectrum, the types of elements can be investigated. ■ Semi-quantitative analysis of intermetallic compounds - By examining the intensity (count number) of each characteristic X-ray, the concentration of the contained elements can be calculated. *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Other EDS Analyses】 ■ Line Analysis - It is possible to profile the concentration distribution of each element along a specified line in the SEM image. - This can be effective for samples with layered compositions. ■ Area Analysis - The distribution of each element can be viewed in two dimensions. - It is also possible to display images with several elements overlaid. *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Purpose】 ■When you want to obtain elemental information about micro areas or micro foreign substances. *For more details, please refer to the PDF document or feel free to contact us.*
