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Announcement of the Introduction of FIB-SEM Helios 5 UC

Cross-section production of soft materials has also been realized! 3D reconstruction is possible with Auto Slice & View!

The introduction of the "FIB-SEM Helios 5 UC" is scheduled to start service in November! We will provide shorter delivery times and reliable feedback than ever before. We will achieve high-throughput cross-sectional observation and analysis of a wide range of materials, from semiconductor devices such as power devices, ICs, solar cells, and light-emitting elements, to electronic components like MLCCs and soft materials. With a high-quality beam of up to 100nA, we can process large areas quickly, and by finishing the FIB at low acceleration, it is possible to produce high-quality samples with minimal damage layers. 【Main Features of Helios 5 UC】 ■ High-speed, large-area FIB processing ■ Reduced damage layers through low-acceleration finishing ■ Cryo-FIB processing ■ 3D imaging ■ Complete automation of TEM sample preparation *For more details, please refer to the PDF document or feel free to contact us.

Related Link - https://www.ites.co.jp/analyze/apparatus/fe-sem

basic information

【Overview of FIB-SEM Composite Device】 ■ SEM column mounted vertically and FIB column mounted diagonally ■ Real-time observation of FIB processing using SEM ■ Improved processing position accuracy ■ Observation and analysis possible without exposure to the atmosphere *For more details, please refer to the PDF document or feel free to contact us.

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For more details, please refer to the PDF document or feel free to contact us.

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Failure analysis of power devices

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Analysis of electronic components and materials using TEM.

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Cross beam FIB cross-sectional observation

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Observation of diffusion layers in semiconductors using FIB-SEM.

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Power semiconductor analysis service

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[Data] Analysis of SEG-LCD Panel Display Malfunction

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[Dataset] LCD Panel Analysis Dataset

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Announcement of the Introduction of FIB-SEM Helios 5 UC

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Power device failure location / Slice & View three-dimensional reconstruction

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Specification verification and failure analysis through reliability testing.

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