Power device failure location / Slice & View three-dimensional reconstruction
By reconstructing a three-dimensional image of the damaged area, observe the overall structure of the destroyed object!
We will introduce the three-dimensional reconstruction of failure locations using the Slice & View function of FIB-SEM. Continuous SEM images of the structure are obtained, and the resulting images are corrected for positional misalignment between SEM images and visualized in three dimensions using three-dimensional construction software (Avizo). By combining the position identification technology for cross-sectioning the failure location with the Slice & View function, it is possible to obtain continuous SEM images that retain the defective state and include information before and after the abnormal area. [Contents] ■ About Slice & View and three-dimensional reconstruction ■ Continuous SEM observation and three-dimensional reconstruction of failure locations identified by OBIRCH *For more details, please download the PDF or feel free to contact us.
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