Observation of thermal deformation using a 3D shape measurement device (VR-6200)
By combining the VR-6200 with the heater stage, it becomes possible to visualize changes during heating.
It is a measuring device that can non-contact measure surface shapes such as concavities, undulations, and surface roughness. We will introduce "Heating Deformation Observation" using a 3D shape measuring machine. First, we acquire a 3D texture image at room temperature, and then we acquire a 3D texture image in a heated state. By overlaying the texture images before and after heating and checking the differential texture image and cross-sectional profile, it can be seen that the substrate in the heated state has higher ends and a lower center compared to the room temperature state. 【Features】 ■ It is possible to visualize and confirm shape changes during heating. ■ Depending on your preferences, it is possible to create profiles for temperature rise speed, waiting time, and temperature settings. *For more details, please download the PDF or feel free to contact us.
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Aites was established in 1993, originating from the quality assurance department of the IBM Japan Yasu office. Based on the technical expertise cultivated through cutting-edge defect analysis and reliability assurance of electronic components at the IBM Japan Yasu office, we have provided various products and services that support the development and manufacturing of semiconductors, displays, organic EL, solar cells, and electronic components to customers both domestically and internationally.