The GP200 series is the first fully pressure-independent PMFC designed specifically for semiconductor applications. With GP200's unique differential pressure technology and state-of-the-art sensor and valve configuration, it eliminates the limitations of traditional pressure-based mass flow controllers, enabling the most extensive and accurate process gas control in the industry. Brooks developed the world's first MFC that allows for the reconfiguration of gas types and flow ranges, and has continued to refresh gas models since its release, with the same functionality incorporated into the GP200. It allows for easy reconfiguration for many gas types and a wide range of flow rates, providing flexible support for a variety of processes. The ultra-fast and highly reproducible valve control of the GP200, along with its resistance to pressure fluctuations, maintains precise flow control to the chamber even in cases of extreme supply pressure variations, enabling tighter process control. The GP200 platform supports a wide range of process conditions and can replace or upgrade many traditional pressure-based mass flow controllers.

When using a thermal mass flow meter, it is very important to understand its measurement principle. Setting high-precision and stable process conditions is not only essential but also very beneficial for troubleshooting and early detection. The sensor consists of a heater (H) placed in the center of the tube and temperature sensors (T1 and T2) positioned equidistantly on either side. The heater is continuously supplied with properly controlled power, generating heat. When there is no flow in the sensor tube, the heat from the heater is evenly transferred to temperature sensors T1 and T2, resulting in both being at the same temperature. However, when there is flow in the direction indicated by the arrows in the diagram, the fluid carries heat away from T1, causing its temperature to drop, while T2 receives heat, resulting in a temperature increase. The resulting temperature difference between T1 and T2 becomes a function of the mass flow rate of the fluid within the sensor tube. This is processed appropriately and output as an electrical signal representing the mass flow rate. (This is an excerpt from the original text.) https://www.youtube.com/watch?v=XKpX3rrt1qc [ITW Japan Co., Ltd. Brooks Instrument]

The SLA5800 series thermal mass flow controllers/meters are widely adopted as standard equipment due to their excellent accuracy, stability, and reliability. This series features a wide range of flow measurement capabilities and is suitable for various temperature and pressure conditions, making it ideal for a broad range of applications including research in the chemical and petrochemical fields, analytical instruments, fuel cells, and life sciences. Contents ■Features and Benefits ■Standard Specifications ■Product Dimensions ■Model Codes ■Approvals, Certifications, and Services ■Service and Support, etc.

The new Quantim QMC Coriolis flow meter (3rd generation) is ideal for applications involving the measurement and control of minute flows of gases and liquids. The Quantim® QMC Coriolis mass flow controllers and meters provide extremely accurate, stable, and reproducible measurements and control for minute flows of gases and liquids. This new 3rd generation Quantim QMC Coriolis mass flow controller and meter contributes to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. Applications: ■ Catalyst research ■ Mass balance calculations in chemical pilot plants ■ Precursors supply to vaporization units ■ Precision coating ■ High-accuracy filling stations ■ Feedback/control loops for metering pumps ■ Vacuum processes ■ Semiconductor wafer processes

The operating principle adopted in the Quantim QMC Coriolis flow meter (3rd generation) is explained in a video. (English) https://www.youtube.com/watch?v=_BXWlSn3Q_I Video Chapters 00:00 About Brooks Instrument 00:16 Operating principle of the Coriolis mass flow meter 00:27 Law of conservation of momentum 00:40 Law of conservation of angular momentum 00:52 Basic structure of the Coriolis mass flow meter 01:07 How to power on 01:23 Sensor structure boasting high stability 01:40 Sensor tube vibrating at natural frequency 02:14 Phase difference detection of the sensor tube 02:59 Signal processing by electronic circuits 03:08 Method of measuring process flow 03:47 Role of the circuit board 03:58 What advanced alarm and diagnostic functions are 04:22 About calibration <Main advantages of the Coriolis flow meter> ■ Improves process quality, yield, and productivity ■ Reduces scale-up time from laboratory to pilot plant and then to manufacturing line ■ Reduces total cost of ownership (TCO)

Model SLA5850/SLA5851/SLA5853/SLA5860/SLA5861/SLA5863 "With just one unit, you can use 14 types of pressure and flow rates in a single process." Imagine such a mass flow controller platform. Moreover, it features excellent reproducibility, precision, and repeatability. This is the evolved simple performance of the SLA5800 series mass flow controllers/meters. The SLA5800 series boasts high accuracy, zero point stability, and repeatability that are characteristic of Brooks Instrument, a leader in mass flow measurement and control technology. Equipped with configurable advanced multi-gas/multi-range capabilities, it offers superior zero drift specifications compared to competing products while demonstrating long-term maintenance of factory calibration and accuracy.

The Sho-Rate series is designed for standard flow monitoring applications and is an area flow meter that excels in cost performance and operability. The "Model 1358" is capable of measuring gases and liquids, providing stable operation in various process lines and installation locations. This product features a visible indicator structure for flow measurement, and you can choose a configuration that incorporates an integrated needle valve with flow adjustment functionality on either the inlet or outlet side as an option.

Variable Area Flowmeters Reliable quality designed to world standards When measuring the flow of high-pressure or high-temperature liquids and gases that are not suitable for plastic, our robust "glass tube variable area flowmeter (rotameter)" allows for more accurate flow measurement. It offers a wider flow range and is suitable for various liquids and gases! Contents ■ Glass tube variable area flowmeters / Metal tube variable area flowmeter lineup ■ Custom design solutions ■ Accessories & replacement parts ■ Support for technical documentation and compliance with various regulatory requirements ■ Services and support, etc.

The GT1600 series glass tube area flow meters are a new family of meters designed for long-term use in processes where confirming flow rates is crucial, suitable for low and high flow gas and liquid applications, featuring robust performance and sturdy housing and design. These versatile and cost-effective flow meters are commonly used in applications that require moderate measurement accuracy. ■ Depending on the selected model, the typical accuracy range is from 1% to 10% of full scale. ■ Ideal for purge-type services, seal oil systems, bearing lubrication, and cooling water display. The GT1600 series flow meters can be configured to replace or upgrade existing Brooks Instrument GT1000, GT1300, and Full-View(R) 1100 series meters (models 1110, 1114, 1140, 1144).

This is a glass tube area flow meter suitable for measuring flow rates from low to high, designed with a robust structure that ensures long-term stable performance for applications involving gases and liquids where visibility of the process fluid is necessary. We will explain this in a 1 minute and 31 seconds video. https://www.youtube.com/watch?v=BgZMdBY4kLM Contents of the recording: ■ Basic mechanism and applications ■ Features ■ Monitoring important flow conditions ■ Scale design (The easy-to-read scale design allows for accurate flow monitoring. It can be operated intuitively, requiring no training for use.)

GT1000, GT1300, and Full-View(R) model successors "A simple yet robust design created to meet accuracy requirements" This is a robust glass tube area flow meter suitable for measuring flow rates from low to high, designed to provide long-term stable performance in applications involving gases and liquids where visibility of process fluids is necessary. The accuracy range can be optionally selected from 1% to 10% of full-scale flow. It is ideal for applications such as managing purge flow, seal oil units, bearing lubricants, and cooling water management. Additionally, when updating our GT1000, GT1300, and Full-View(R) 1100 series (models 1110, 1114, 1140, 1144), you can choose from model codes as compatible successors. Applications: ■ Industrial processes ■ Pharmaceutical manufacturing ■ Oil and gas pumping and refining processes ■ Chemical manufacturing ■ Burner control ■ Water treatment and supply systems

When measuring the flow rate of liquids or gases that are unsuitable for plastic due to high pressure or high temperature, our robust "glass tube variable area flow meter (rotameter)" allows for more accurate flow measurements. It offers a wider flow range and is suitable for various liquids and gases! 【Features】 ■ Glass tube variable area flow meter ・ Flow measurement technology with high durability, economy, and excellent operability ・ Capable of a wider flow range, suitable for various liquids and gases ■ Metal tube variable area flow meter ・ Durability and accuracy that withstands high pressure and harsh temperature environments 【Product Lineup】 ■ Glass tube variable area flow meter ・ Sho-Rate models 1350, 1355, 1358 ・ GT1600 series ■ Metal tube variable area flow meter ・ MT3750 series ・ MT3809 series ▼ For more details, visit https://www.brooksinstrument.com/ja-jp/products/variable-area-flow-meters

In fields such as chemistry, petrochemicals, and pharmaceuticals, there is a demand for measurement and control devices that can operate stably over the long term in explosion-proof environments. The 'SLAMf series' handled by ITW Japan is a thermal mass flow controller/meter that has obtained domestic explosion-proof certification (JPEx). It supports a wide flow range of 0.003 to 20800 slpm, achieving both high precision and long-term zero point stability. It has a wealth of installation records in both domestic and international plants, as well as in manufacturing lines. Models: SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64 Applications: ■ Pilot plants for petrochemicals and chemical gases ■ Life science bioreactors ■ Blanketing in food processing

Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.

Low-emissivity (Low-E) coated architectural glass has become one of the most popular functional building materials. It plays a crucial role in improving the energy efficiency and energy-saving properties of buildings by minimizing heat loss and internal condensation. The coating (thin film) applied to the glass controls the flow of visible light energy passing through the glass. This coating alters the characteristics of light transmission, reflection, and absorption in different parts of the electromagnetic spectrum, such as infrared, visible light, and ultraviolet. When viewed from inside the building, Low-E glass reflects energy back into the building, achieving significantly lower heat loss compared to regular glass. When viewed from outside the building, Low-E glass allows the visible portion of solar energy to pass through while minimizing the infrared portion, thereby reducing heat loss from the building.

The manufacturing processes and various evaluation devices for secondary battery materials, biotechnology, and surface treatment, as well as flow and pressure measurement instruments used in the EPC industry, must not only meet the appropriate functions and accuracy for their applications but also possess durability that allows for safe long-term use. At ITW Japan, we offer "flow and pressure measurement instruments" such as mass flow meters/controllers and pressure controllers for gases, as well as transducers that excel in long-term stability, "Coriolis flow meters" suitable for high-precision control and measurement of small liquid flows, "metal tube area flow meters" with a wealth of experience in the EPC industry, and "glass tube area flow meters" that are highly versatile and suitable for durability and cost-effectiveness. To ensure our products are used for a long time, we provide calibration and repair maintenance not only with domestic support but also at overseas locations. 【Examples of device applications】 Solar cell-related / Semiconductor-related / Medical device-related / Centrifuges / Filtration skids / Fermentation tanks / Various coatings / Fill & finish / Bioreactors (additive supply) and more ▼ Download the materials here 　https://www.ipros.jp/product/detail/2000744379

Model SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64 "Durability to withstand harsh environments! Achieving excellent precision with precise mass flow control" Whether indoors or outdoors, in environments with dust or places that handle water, the 'SLAMf series' elastomer seal thermal mass flow controllers/meters provide proven high precision and long-term stability unique to the "SLA5800 family." Applications ■ Pilot plants for petrochemical and chemical gases ■ Life science bioreactors ■ Blanketing in food processing

Many people may have questions like, "What can be done with IoT?" and "What is needed?" upon hearing the term IoT. Through digital communication, it is possible to obtain various information such as flow sensors, valves, circuit boards, and abnormal monitoring that were not accessible with traditional analog control. For example, by monitoring the valve opening, one can detect blockages in the equipment and identify leaks from cumulative flow. This information directly contributes to reducing downtime and improving quality through continuous long-term monitoring and knowledge-based management. Compatible models include those with digital communication via RS485, in addition to traditional analog controls like 0-5VDC and 4-20mA. (Older models such as the 58xxS, MfxxS series, SLA58xxS, and SLAMfxxS series). Even older models that do not support digital communication can be upgraded to the latest mass flow models, enabling digital communication. The dimensions between new and old models are the same, and no wiring changes are necessary. Additionally, we can provide control boxes for data collection from mass flow. This enables a "visualization" of small IoT without making large changes to the equipment.

Brooks Instrument provides excellent meter reproducibility, enabling accurate measurement and control of complex industrial processes. We explain how to connect the 'MT3809 (metal tube variable area flow meter)' to a FOUNDATION Fieldbus transmitter in a video. (In English) https://www.youtube.com/watch?v=KOgdtYaxHjc Video Chapters 00:00 How to connect to a FOUNDATION Fieldbus network 00:39 Removing the terminal block 00:57 How to connect the wiring 02:20 Conduit connection 02:45 How to install the housing For more information about our metal tube variable area flow meters, please visit: https://www.brooksinstrument.com/ja-jp/products/variable-area-flow-meters/metal-tube/mt3809-series

"Maximizing the Best Performance" This is the industry's first fully pressure-insensitive type of pressure-based mass flow controller (P-MFC) specifically designed for advanced etching and deposition processes in semiconductor manufacturing. The GP200 series P-MFC adopts a patented architecture that overcomes the limitations of conventional P-MFCs, enabling high-precision process gas supply even with low vapor pressure process gases. It also features a built-in differential pressure sensor and a unique design that places the valve downstream, allowing for high-precision process gas supply across the widest range of operating conditions in the industry. Due to its compatibility with a wide range of process conditions, it can be used as a replacement or upgrade for conventional P-MFCs and thermal MFCs. Additionally, by eliminating the need for components such as pressure regulators and converters, it simplifies the gas supply system and reduces costs. [Main Applications] ■ Semiconductor Manufacturing ■ Etching ■ CVD ■ Gas flow control applications requiring high-purity all-metal flow paths

The operating principles of the SLA series are explained in the video. (English) https://www.youtube.com/watch?v=XKpX3rrt1qc Video Chapters 00:00 What is Brooks Instrument? 00:10 How to connect power to the thermal mass flow meter 00:24 Basic structure of the thermal mass flow meter 00:35 Diverting a portion of the gas flow with a laminar flow element 00:56 Measuring temperature difference with thermal sensors 01:08 Excellent sensor stability 01:37 How to measure process gas flow 02:17 Circuit board of the thermal mass flow meter 02:34 What are advanced alarm and diagnostic functions? <Main advantages of Coriolis flow meters> ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration, reducing total ownership costs ■ Brooks Instrument's unique thermal sensor technology improves the S/N ratio and enhances flow accuracy at low set points.

Application notes from various markets showcase how Brooks Instrument's measurement and control technologies create competitiveness for original equipment manufacturers, pilot plants, production plants, laboratories, and universities. ■ Analyzer Market ■ Aerospace and Automotive ■ Chemical and Petrochemical ■ Food & Beverage ■ Life Sciences: Biotechnology, Pharmaceuticals, Medical Devices ■ Oil & Gas ■ Semiconductor Manufacturing ■ Thin Films, Coatings, and Surface Treatment ■ Water Treatment and Wastewater Treatment For more details, visit here: https://www.brooksinstrument.com/ja-jp/markets

Model GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121 / GF125 / GF126 "Achieving high purity and ultra-high purity process gas supply with excellent response speed and repeatability" The GF100 series, designed for semiconductor, MOCVD, and other gas flow control applications, ensures high repeatability and stable performance, providing reliability that exceeds industry standards. With standard MultiFlo(TM) technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. It achieves industry-leading gas cleanliness while enhancing process flexibility and efficiency, maximizing yield and productivity. Applications ■ Semiconductor etching tools ■ Thin film chemical vapor deposition (CVD) systems (CVD, MOCVD, PECVD, ALD) ■ Physical vapor deposition (PVD) systems ■ Epitaxial process systems

【New Product Information】 Coriolis Mass Flow Controller/ Meter 'QMC Series' GF120xHT Series Metal Seal Specification 'High-Temperature Mass Flow Controller' ★Please check the features in the 【Panel Materials】! We also offer online briefings. If you are interested, please feel free to contact us. https://www.brooksinstrument.com/ja-jp/about-us/contact

■ Wide flow range/pressure conditions and support for digital I/O ■ Certificates and certifications ■ Applications Please take a look here. https://www.ipros.jp/catalog/detail/752600 You can also view it from related catalogs.

Hot melt extrusion (HME) is a method that involves melting polymers by applying heat and pressure, and extruding them into molds in a continuous process. HME is widely used in the plastics industry and has recently been applied to pharmaceutical formulations and drug delivery systems. The HME process is used to mix active pharmaceutical ingredients (APIs) with polymers and other excipients at high temperatures and pressures. The extruded material can be cut or ground into micro-pellets for filling into capsules or compressing into tablets. ☆Application note now available☆ "Enhancing Drug Delivery Systems through High-Precision Measurement and Control of Supercritical CO2 Using Coriolis Mass Flow Meters" For more details, visit here https://www.brooksinstrument.com/ja-jp/blog/highly-reliable-accurate-coriolis-flow-meter-for-carbon-dioxide-injection [ITW Japan Co., Ltd. Brooks Instrument]

A world where miniaturization and high performance are progressing daily. Mobile phones now have features that were unimaginable just a few years ago. This high performance has been made possible thanks to thin film technology, which is utilized in a wide range of applications as listed below. 【Applications of Thin Film Technology】 - Microelectronics - Anti-reflective coatings for glass - Antibacterial metal coatings for medical devices - Flexible solar cells Thin film technology is defined as "the process of creating, coating, and processing thin film materials on a substrate surface." 【PVD and CVD Technologies】 - What is PVD? - What is CVD? - What is Thermal Filament CVD? - What is Plasma CVD? - CVD Process - Range of CVD Applications - Battery Market - Thin Film Technology Used in the Battery Market Please take a moment to read it. https://mono.ipros.com/news/detail/129945/

We will introduce a comparison of CVD and PVD, applications of flow meters and pressure gauges, and examples of digitalization in process control. In a world where miniaturization and high performance are advancing daily, mobile phones now have features that were unimaginable just a few years ago. The realization of such high performance is thanks to thin film technology, which is utilized in a wide range of applications such as the following: 【Applications of Thin Film Technology】 - Microelectronics - Anti-reflective coatings for glass - Antibacterial metal coatings for medical devices - Flexible solar cells Thin film technology is defined as "the process of creating, coating, and processing thin film materials on a substrate surface." We will provide explanations of thin film technology, comparisons of CVD and PVD, applications of flow meters and pressure gauges, and examples of digitalization in process control. We encourage you to read on. ★ We also offer foundational knowledge that delves deeper into the explanations of CVD and PVD, as well as basic knowledge materials related to glass coatings for the glass industry! https://mono.ipros.com/news/detail/128269/

Exhibition Booth: Space Number 8-38, Tokyo Big Sight, East Exhibition Hall At our exhibition booth, we are showcasing various flow meters with proven results in hydrogen and fuel cell research, development, and manufacturing. Our thermal mass flow meters can monitor the equipment's status in real-time using dedicated software. Additionally, on-site customization is possible, including adjustments to the PID parameters of control valves, alarm settings, and changes to gas types and full-scale flow range settings. To allow you to experience the user-friendly and multifunctional software's operability, our specialized staff is looking forward to your visit at the exhibition venue. ▼ Featured Exhibits ◎ GF40 Series: Thermal mass flow controllers/meters compatible with gas type and range changes ◎ QMB Series: Coriolis mass flow controllers/meters ◎ SLA5800 Series: Thermal mass flow controllers/meters suitable for high pressure and large flow rates

Exhibition Booth: Space Number W1-57 Tokyo Big Sight West Exhibition Hall In the fuel cell test stand used to evaluate the performance of fuel cells, it is important that gas flow control is not only highly accurate but also has high reproducibility. Brooks Instrument's mass flow devices are equipped with sensors that offer exceptional long-term stability and can flexibly control a wide flow range and pressure variations. Additionally, using dedicated software allows for on-site customization and calibration of valve tuning. At the exhibition venue, our specialized staff will be waiting to help you experience the user-friendly and multifunctional software. ▼ Featured Exhibits ◎ SLA5800 Series: High-pressure, high-flow thermal mass flow controllers/meters ◎ GF40 Series: Thermal mass flow controllers/meters compatible with gas type and range changes ◎ QMB Series: Coriolis mass flow controllers/meters