High Load Objective Lens Focus Scanner P-726
A stroke of 100 µm, a system resolution of 0.4 nm, and a resonance frequency of 560 Hz even at a load of 210 g.
The P-726 is a PIFOC® high-load focus scanner that drives heavy high NA objective lenses with high speed and precision. It features built-in flexure guides and capacitive sensors, achieving an OpenLoop resolution of 0.3 nm and a linearity error of 0.02%. The resonance frequency is maintained at 1120 Hz without load and 560 Hz with a 210 g load, accelerating Z-scanning for semiconductor wafer inspection and confocal/super-resolution microscopy. It supports major thread sizes such as M32/M27 with the QuickLock adapter. *For more details, please download the PDF or contact us.*
basic information
- High dynamic positioning/scanning with large objective lens - Resonant frequency 1120Hz (560Hz at 210g load) - Standard settling time approximately 6ms - Stroke 100μm - Achieves high linearity, stability, and dynamics through direct measurement with capacitive sensors - Resolution ~0.3nm - Improved focus stability with frictionless precision flexure guides *For more details, please contact us or refer to the catalog.
Price information
Please feel free to contact us.
Delivery Time
Model number/Brand name
P-726 PIFOC(R) High Load Objective Lens Scanner
Applications/Examples of results
Application examples - 3D images - Screening - Autofocus systems - Microscopes - Confocal microscopes - Surface shape analysis - Wafer inspection
